Positioning device for positioning a first substrate relative to a second substrate

Abstract

A positioning device (10) for positioning a first substrate (14) relative to a second substrate (18) is described. The positioning device (10) comprises a first substrate holder (12) for holding the first substrate (14); a second substrate holder (16) for holding the second substrate (18), wherein the first substrate holder (12) and the second substrate holder (16) are mounted such that a distance between them is adjustable; and a distance-control element (20) which can be inserted between the first substrate holder (12) and the second substrate holder (16), wherein the distance-control element (20) comprises a body (22) with a fluid inlet (24), a first substrate fluid outlet (26) which is connected to the fluid inlet (24) and which is directed towards the first substrate holder (12) and configured to eject pressurized fluid from the body (22) in the direction of the first substrate (14) when the first substrate (14) is located in the first substrate holder (12), and with a second substrate fluid outlet (28) which is connected to the fluid inlet (24) and which is directed towards the second substrate holder (16) and configured to eject pressurized fluid from the body (22) in the direction of the second substrate (18) when the second substrate (18) is located in the second substrate holder (16). Fig. 1