IMPROVED OPTICAL ELEMENT WITH MULTIPLE MEANS

Abstract

The invention relates to an optical element comprising a cover having a first surface and a second surface, a support, and a means. The cover is orientated with the first surface directed towards the support. A part of the first surface is attached to the support. A spatial arrangement of the cover as seen in a cross section of the cover defines a cover contour profile. The means is arranged to move the cover from a first cover contour profile to a further cover contour profile which is different from the first cover contour profile, and / or the means is arranged to provide an output that is representative of the cover changing from the first cover contour profile to the further cover contour profile. The means comprise at least two separate submeans. 1 <fig 3b>

Description

l IMPROVED OPTICALELEMENTWITHMULTIPLEMEANS The current application relates to an optical element comprising, a cover having a rst surface and a second surface, a support, and ameans. The cover is orientated with the rst surface directed towards the support, a part ofthe rst surface is attached to the support, a spatial arrangement ofthe cover as seen in a cross section ofthe cover denes a cover contour prole, and the means is arranged to move the cover from a rst cover contour prole to a further cover contour prole which is different from the rst cover contour prole. An optical element is known from e.g.WO 2021 / 032752 Al andWO 2018 / 228671 Al. This document discloses optical devices ofspecic interest. The working principle is thatwhen a cover is provided that has some desired optical behaviour, e.g. reecting light, transmitting only some light, etc. the interaction ofincident light can be changed by changing the cover contour prole. To facilitate the cover changing shape to facilitate changing the optical behaviour ofthe optical device, the cover is made relatively thin, in terms ofWO 2021 / 032752 Al 2-dimensional. As an example, a single graphene layer cover is presented, with a coating on top to obtain desirable optical behaviour. Since the optical device is very small, they can be used to act like a pixel in a larger collection of similar devices. Control of scattering, reection and / or interference behaviour can be used to turn a pixel on or offand / or vary its colour. This way, images can be generated and / or manipulated. Several principles ofoperation are available with such optical devices.A rst operational principle is shown in gures lA lC, which correspond to gures 9 ll ofWO 2021 / 032752 Al. These gures show respectively an optical device with a at cover, a convex cover, and a concave cover. Light incident on the at cover (g. 1A) is reected as ifhitting a smooth and straight surface, i.e. parallel incident rays remain parallel after reection. As such, specular reection takes place at the cover. In the convex and concave positions ofthe cover, parallel incident rays are no longer parallel after reection, thus causing diffuse reection. By changing the shape ofthe cover, it is thus possible to alternate between specular and diffuse reection. To suit this rst operational principle, the cover is sufciently reective towards the incident light. In this example, the light is incident on the second surface, whichmay also be called the outside ofthe optical device. Figures 2A 2C, which correspond to gures 12 l4ofWO 2021 / 032752 Al, show a second operational principle. Reference is rst made to the substrate which spans the support on an opposite side ofthe cover, in order to dene a cavity between the cover and the substrate. The substrate is partly reective and partly transmissive. The cover is relatively reecting. Light incident on the substrate is thus partly transmitted and partly reected. The transmitted light reects on the rst surface ofthe cover, i.e. coming from the inside, and is transmitted back through the substrate, where it interferes with the light reected by the substrate. Depending on the wavelength ofthe light and the distance between the cover and the substrate, the interaction can be constructive or destructive. Since that distance changes when the cover changes shape, the interferometric characteristics ofthe optical device can be changed. Figures 8 and 9 show even otherways ofusing the changing cover contour prole. In the case ofgure 8, an optical element is shown with a substrate 106 that is relatively reective. The cover 101 in this case is relatively absorbing. Nevertheless, ofan incoming lightbeam 601, at least some lightmay be transmitted towards the substrate 106 as transmitted lightbeam 603. This reects back via the substrate 106 as reected light 604. Due to interference ofthe transmitted lightbeam 603 and the reected light 604, a pattern ofnodes and antinodes is present. The cover 101 can then be moved, e.g. by changing its cover contour prole or its position with respect to the support, to place the cover at an antinode for absorbing the light, or at a node for not or absorbing less the light. Accordingly, the exiting light 605 can be present in less ormore intensity by controlling the cover. This principle is called interferometric absorption. Figure 9 shows the principle ofinterferometric reection, similar to g. 2, but with light 601 incident the cover. In this case, light is partially transmitted through the cover 101, and reected at the substrate 604, which for that purpose is reective. The cover 101 reects some light 605, but also transmits some light 603. After reecting 604 from the substrate 106, light passing through the cover 101 again interferes with the reected light 605. By controlling the position or cover contourprole ofthe cover 101, control is possible ofwavelengths oflight that do or do not interfere constructively. In both cases, light transmitted through the covermay actually be refracted. However, since the gures show a specic example oflight incident normal to the cover, the wording transmitting was used. The invention can however be applied, depending on the use-case, to non- normal light also. These principles have been described only briey herein, as the operational principles involved are in themselves known, and have been applied e.g. inWO 2018 / 228671 A1 (see gures 1 and 2). These principles thus show thatby varying the reectance and / or transmittance and / or absorbance ofthe cover and the substrate, and the direction atwhich light is incident (from outside or inside the optical device), it is possible to cause the cover to create a certain interaction with the light, optionally in cooperation with the substrate. The interaction changes when the cover shape changes, i.e. when the cover contourprole changes. There exists however a need to further improve the device, by allowing more control over the interaction with light. It is an object ofthe invention to provide an optical element that allows additional control over the interaction with light. The need is metby an optical element according to claim 1. The optical element comprises a cover having a rst surface and a second surface, a support, and ameans. The cover is orientated with the rst surface directed towards the support, a part ofthe rst surface is attached to the support, a spatial arrangement ofthe cover as seen in a cross section ofthe cover denes a cover contour prole and the means is arranged to move the cover from a rst cover contour prole to a further cover contour prole which is different from the rst cover contour prole. In particular, the means comprise at leasttwo separate submeans. By including at leasttwo separate submeans, itbecomes possible to more accurately control the cover shape, or to create cover shapes thatwould be impossible using only a single means. The invention is thus in part based on the realization that a single cover can be matched with multiple means. Accordingly, the optical element can be relatively small, yet relatively versatile too. As an example, using the enhanced control ofthe cover shape, the optical element could be used forbeam steering. Ofcourse, abeam interacting with the cover is inuenced by the shape of the cover. Using the at leasttwo submeans, it becomes possible to create cover shapes otherwise impossible, so that the beam steering can be affected. Although it is possible each ofthe at leasttwo submeans is based on the same operational principle, possibly even similar or identical in structure and / or location as seen in plan view, it is also possible to include submeans ofdifferent operational principles. Accordingly, the optical element can be provided with submeans tailored to specic use cases or desired characteristics. As an example, which is in no way limiting, a thermal actuatormay be combined with an electrostatic or capacitive actuator. The thermal actuatormay be used to change the mechanical properties ofthe cover, colloquially worded in order to tune the cover. This is typically performed at a relatively low frequency. At the same time, the electrostatic or capacitive actuation may take place at a higher frequency, in order to inuence light interacting with the optical device. Ofcourse, othertypes ofoperational principles can be used forthe actuation. It is in general possible to choose any combination operational principle. For instance, two operational principles may be combined for their operational principle being suitable for different frequency ranges, for a different area of effect, for themaximum strength ofactuation, or other dynamic, mechanical, or constructional considerations. It is noted that in the optical element described herein, which can be made very small, actuation using an operational principle from one domain, often causes an effect in another domain as well, since the optical elementmay be fundamentally a multi-physics device. As an example, a voltage applied to the covermay at the same time cause a change in temperature. When the different submeans are ofa different operational principle, theymay therefore still cause effects in each others domain. As such, itmay be benecial to dene the operational principle as the primary change caused by the actuator. When submeans are used that have an effect in overlapping domains, the submeans may be used to enforce or reduce each others effect, thereby allowing for a constructive or destructive cooperation between the two submeans. Generally, each ofthe at leasttwo separate submeans has an effective range, which is dened as the portion ofthe coverupon which the means act. It is advantageous ifthe effective ranges ofeach ofthe at leasttwo separate submeans is different. Accordingly, itbecomes possible to control different parts ofthe cover, and / or control the cover in different positions, using the at leasttwo different submeans. Ofcourse, a similar effect can be achieved ifthe submeans operate on a different part of the cover, for instance by positioning them differently with respect to the cover. This principle will be elaborated on further below. First however, it is noted that it is also advantageous ifthe submeans are individually controllable. This greatly increases the differentways the cover can be affected, and thus increases versatility. In orderhowever to allow for relatively elegant control algorithms, the at leasttwo separate submeans can be spaced at substantially equal distance from the cover, when the cover is in its unactuated position. As an example, the submeans may be placed in a single plane that is parallel to the cover. When the distance between the submeans and the cover is equal for each submeans, and their location with respect to the cover is equivalent, i.e. both towards the middle ofthe cover, or towards at the edge ofthe cover, they can have a similar effect on the cover, so that their interactionmay approximately correspond. As an example, a rst submeans may be used to mainly inuence a rst part ofthe cover, whereas the other mainly inuences another part ofthe cover. If the location with respect to the cover is similar in both cases, possible effects are symmetrical similar to the positions ofthe submeans. To make maximal use ofthe similar behaviour ofthe submeans, the submeans may be arranged in similar locations, i.e. mirrored around a centroid at a similar distance. In general, many symmetrical arrangements are possible, especially around a centroid ofthe cover, projected to the plane ofthe submeans. Exemplary symmetries ofuse are rotational, mirrored over a line passing through the centroid, and radial symmetry. In general, it is possible the optical element further comprising a substrate on a side ofthe support opposite the cover. The substrate can be used primarily as a constructional feature that holds the support, which in turn hold the cover. Further, the substrate may be used to dene a cavity below the cover. The index ofrefraction of said cavity can be ofinuence on the optical behaviour ofthe optical element. The index ofrefraction ofthe cavity can be inuenced by at least partially lling the cavity. To facilitate said lling the cavitymay be enclosed by one ormore ofthe support, the cover and the substrate, ormay even be sealed entirely. Different llings ofthe cavity can lead to different refractive indices, and thus a different optical behaviour. The cavitymay for this purpose be lled with a gas composition. Aside from a gas or gas mixture, the cavity may also be lled by a liquid (mixture) and / or liquid crystals, or even a solid lling, whichmay have a greater effect on the refractive index. Another option would be to instill avacuum inside ofthe cavity. Denition of, and lling ofthe cavitymay also be done for other reasons than inuencing the index ofreection, i.e. to provide absorption, to provide structure rigidity, or other reasons. Moreover, the substance lling a cavity can be ofinuence on other than the optical behaviour ofthe optical element, including but not limited to the mechanical response ofthe cover and the electrical inuence ofthe means.A lled cavity can also be used to exert a pressure on the cover, in order to move it using pressure based means. Each ofthe at leasttwo separate submeans may be arranged in or on the substrate. Positioning the submeans on or in the substrate allows access to the submeans from a side away from the cover, so that control lines can be provided without interfering too much with the optical behaviour ofthe cover. Moreover, the substrate can be provided with the submeans even before the support and / or cover are present, whichmay offerbenets for manufacturing. A particularly symmetrical effect can be achieved ifthe at leasttwo separate submeans are arranged in register, such as in a rectangular matrix, possibly in a square matrix. The matrixmay be dened as a series ofrows and columns that are perpendicular to each other. The shape ofthe matrixmay ofcourse correspond to the shape ofthe cover as dened by the support. However, it is also possible the matrix has a different shape. As an example, the cover may be circular in shape, at least the part ofthe cover that is capable ofmovementmay be circular, whereas the matrix is square. Arranging the submeans in registermay allow for distinct behaviour in selectable directions, corresponding to the rows and / or columns ofthe register. The at leasttwo separate submeansmay be identical. In this case, they can be used to affect the cover in similar ways, in order to create a balanced effect across the cover. With regards to the positioning, it is possible the at leasttwo separate submeans comprise a central submeans arranged centrally with respect to the cover, and one ormore radial submeans arranged radially offset from the central submeans. In this case, the radial positioning ofthe radial submeans allows to adjust the cover near a periphery thereof, whereas the central submeans may adjust the cover in its center. The radial submeans may therefore be used to compensate for, counteract or enhance edge effects originating from the cover being connected to the support. Using multiple submeans as dened herein is particularly advantageous, ifthe submeans collectively cover an area equal to at least50% ofa surface area ofthe rst surface ofthe cover, preferably at least 60%, more preferably at least 70%. By covering such a large area, the shape ofthe cover can be controlled relatively accurately. As mentioned above, each ofthe at leasttwo separate submeans could comprise an electrical component, such as an electrode. Using electrical components, such as electrodes, is a practical way to control the cover. Also, electrodes can be controlled independently ifdesired. The effects produced by multiple electrodes operate at the same time interact in a relatively predictable way, so that modelling becomes sufciently easy for a multitude ofoptical elements ifdesired. Ofcourse, other submeans may be used, for instance each ofthe at leasttwo separate submeans comprise any one ormore of: - an optical actuator, such as an optical tweezer or photonic circuitry, - ameans for applying or changing radiation incident on the cover, such as a radiation source. - ameans for inuencing a gas pressure acting on the cover, - a speaker or any other sound emitter, - a thermal actuator, operating viathermal expansion, and - an electromagnetic and / or superconducting actuator, for instance operating based on tunneling or eld emission. At this time, it is noted that regardless ofthe actuation method used, given a sufciently small system, any one actuation method will often have some corresponding co-phenomenon in another domain as well. As such, at nano-scale, the actuation method and corresponding co- phenomena usually pair up. Examples ofsuch pairs, whichmay be used in the currently described invention as a non-exclusive list ofexamples, are: - Thermo-electrical and electro-thermal actuation, - Thermo-optical and opto-thermal actuation, - Thermo-magnetic and magneto-thermal actuation, - Opto-electrical and electro-optic actuation, and - Magneto-optic and opto-magnetic actuation. At the same time, quantum and superconducting effects may also play a role. Accordingly, use can be made ofsuch effects ifdesired. When submeans are used that require an electrical input, the optical elementmay further comprise one ormore electric circuits connected to each ofthe at leasttwo separate submeans, the one ormore electric circuits being congured to supply a different current and / or voltage to each ofthe at leasttwo separate submeans. Accordingly, itbecomes possible to drive the submeans separately, for example from a distance. Also, electric circuits can be manufactured on a sufciently small scale to power multiple submeans. The supportmay be chamfered on a side facing the cover, preferably facing a center thereof. As was explained above, the use ofmultiple submeans enhances control over the cover. It may for instance be possible to create shapes in the cover that are not symmetrical, include relatively high curvatures and / or steep inclines, etc. Even more variation in the allowed deformation ofthe cover can be encouraged or allowed by the chamfer ofthe support. The chamfer would prevent a sharp interaction or angle between support and cover, which could damage the cover or prevent deformation of it. The chamfermay be ofany suitable radius. As mentioned above, the multiple submeans allow inuencing the shape ofthe cover in various ways, different from when only a single submeans would have been provided. The invention therefore also concerns amethod ofoperating an optical element as described herein, comprising operating each ofthe at leasttwo separate submeans differently, thereby changing the shape ofthe cover contour prole. An optical element as described in the paragraphs hereabove can lead to new use cases for such optical elements compared to conventional optical elements. Therefore, the invention also relates to a use ofan optical element as described above forbeam steering. The optical element described herein can be ofany suitable type, and provide optical behaviour based on any number of suitable principles. As an example, the optical device can operate by reecting light using the cover. For that purpose, it is possible the cover has a relatively large reectance as compared to its transmittance. As an example, the value oftransmittance divided by reectance would be not more than 0.5, preferably notmore than 0.25, more preferably notmore than 0.1, most preferably not more than 0.0 1 . The transmittance, reectance and absorbance dened herein may be measured at a wavelength ?t which varies from 10nm to 3000 um. In one aspect, most preferably 380 to 740 nm. In another aspect, more preferably from 10nm to 200 nm, most preferably from 13 nm to 193 nm. In another aspect, more preferably from 700nm to 2000 nm, most preferably from 850nm to 1550 nm. In another aspect, more preferably from 30 000nm to 3 000 000 nm. Ofcourse, absorptionmay also be considered. As an example, the optical device can operate by absorbing light using the cover. For that purpose, it is possible the cover has a relatively large absorbance as compared to its reectance. As an example, the value ofreectance divided by absorbance would be notmore than 0.5, preferably notmore than 0.25, more preferably notmore than 0.1, most preferably notmore than 0.01. The absorbance and reectance dened above may be measured at a wavelength X which varies from 10nm to 3000 um. In one aspect, most preferably 380 to 740 nm. In another aspect, more preferably from 10nm to 200 nm, most preferably from 13 nm to 193 nm. In another aspect, more preferably from 700nm to 2000 nm, most preferably from 850nm to 1550 nm. In another aspect, more preferably from 30 000nm to 3 000 000 nm. The optical elementmay be congured for reecting light incident on the second surface. In that case, the transmittance and reectance may be measured for light incident the second surface. Alternatively, the optical elementmay be congured for reecting light incident on the rst surface, in that case, the transmittance and reectance may be measured for light incident the rst surface. Besides using the cover for reection only or mainly, it is also possible to employ reective interference, taking place mainly between a reected lightbeam at the substrate (or cover) and a refracted lightbeam through the substrate (or the cover) that the cover (or substrate) reects, or absorbing interference, taking place mainly between a reected light bean with the incident lightbeam at the substrate (or cover) and its absorption at the cover (or substrate). An optical element congured for this purpose is called an interferometric optical device. The absorbance ofthe covermay accordingly also be relevant, as explained above. The interference may take place for light incident the second surface, or for light incident the rst surface. In the latter case, a substrate is needed below the cover, as is described further below. The substrate is congured for transmitting a part ofthe light and reecting a part ofthe light. The transmitted light is then reected on the cover, and transmitted back outthrough the surface. The egressing light interferes (constructively or destructively) with the directly reected light. Depending on the position ofthe cover with respect to the substrate, it is possible to change the interference-based behaviour ofthe optical element. Depending on the desired optical behaviour, it is ofcourse possible to use a cover with different ratios ofreectance, transmittance and absorbance, optionally in combination with eg. a reective, transmissive or absorbing substrate, the terms reective, transmissive or absorbing being dened using the same ranges forthese respective quantities, and / orthe same ratios betweenthem as is dened forthe cover. In general, the optical properties for the substrate are chosen complimentary to the optical properties ofthe cover. The invention is not limited to any such combination, rather to inuencing the cover using the submeans. Ofcourse, the substrate need not be square or rectangular. The substrates shape in general is not important, it is even possible for a single substrate to span multiple optical elements. More relevantmay be the shape dened within the support, as this denes the shape ofthe optical element in plan view. It is possible this shape is square or rectangular, to create a pixel-like element, but circular optical elements are also envisaged. The invention may howeverbe applied to optical elements ofall shapes. This is true for all embodiments described herein, whether they do or do not have a substrate. It is noted that for some shapes ofoptical elements, the substrate is rigid and planar, while for others it is possible for it to be exible and / or curved. In such cases, the spacer and cover are adapted to the substrate, in such away that the second surface ofthe cover is approximately parallel to the substrate. In this case, the cover is preferably reective, for instance as expressed in the ratio above. The substrate is not as reective, for example having a ratio oftransmittance divided by reectance ofmore than 0.5, more than 0.75, more than 0.9 or even more than 0.99, or even more than 1, preferably for light incident from a surface ofthe substrate facing away from cover. The opposite direction is also possible, where the cover transmits and reects light, and the substrate reects the transmitted light. In this case, the coverwould be relatively transmissive, for example having a ratio oftransmittance divided by reectance ofmore than 1, for light incident the second surface, so that it is relatively transmissive. Said ratio could for instance be between 1 and 3, such as between 1.5 and 2.5, such as around 2. The absorbance could in this case be relatively high. The substrate would preferably be reective for light incident a surface ofthe substrate facing the cover. The reectance could be dened by a ratio oftransmittance divided by reectance ofnotmore than 0.5, preferably notmore than 0.25, more preferably notmore than 0.1, most preferably notmore than 0.01. Unless stated otherwise, transmittance and reectance are measured for light normal to the surface ofthe cover. In case a cover is used that is relatively reective, a value ofabsorbance divided by reectance ofthe cover can be less than 0.5, preferably notmore than 0.25, more preferably not more than 0.1, most preferably notmore than 0.01, for light incident the rst and / or second surface, depending on the desired optical behaviour. It is noted that in all cases, the position and shape ofthe cover inuence how the optical device interacts with incident light. Other operational principles which rely on the change ofthe cover position and shape can however also be applied, and the current invention is thus not limited to either reective or interferometric operational principles. In any case, the invention is not limited solely to a cover with a changing shape or a changing cover. In terms ofclaim 1, this can be realized by dening the spatial arrangement ofthe cover with respect to the support. After all, a cover that has not changed in shape but is at a different position with respect to the support, still has a different spatial arrangement as seen in cross section ofthe cover with respect to the support. As such, depending on the use, changing the position ofthe cover (without changing its shape) or changing the shape ofthe cover, thereby changing partially its position, could be used interchangeably. The covermay comprise a 2-dimensional portion. The 2-dimensional portion may be an extreme membrane. For the purpose ofthe invention in general however, it is sufcient ifthe 2- dimensional portion is sufciently thin to be deformed and / ormoved using the applicable means. In general, it is not necessary, however possible, that the 2-dimensional portion has favourable optical properties in and of itself. Instead, it is possible to provide the desired optical properties using additional material, such as an additional layer or an amorphous portion ofthe cover, which could be or could comprise a metal or an additive. In that regard, reference is made toWO 2021 / 032752 A1 which explains multiple congurations ofthe cover. The skilled person is readily able to vary e.g. the thickness and material ofthe additional material to arrive at desired optical properties for the cover. In that regard, it is noted the 2-dimensional portionmay function as a carrier, whereas the additional material provides desired optical properties. The 2-dimensional portionmay be as dened in embodiment [39a] ofWO 2021 / 032752 A1. Accordingly, the 2-dimensional portionmay be one ormore ofthe following: a. One ormore selected from the group consisting of: C, BN, P, MoS2, MoSe2, MoTe2, WS2, WSe2, WTe2, NbS2, NbSe2, NbTe2, TaS2, TaSe2, TaTe2, TiSe2, VSe2, CrS2, CrSe2, B, Ge, Si, Si2BN, Sn, Pb, P, Sb, Bi. The preferred C in this context is one ormore selected from the group consisting of: graphene, one ormore graphitic layers and graphyne, preferably graphene. The preferredBN in this context is h-BN. The preferred P in this context is black phosphorus or phosphorene. The preferredB in this context is borophene. The preferred Ge in this context is germanene. The preferred Si in this context is silicene. The preferred Sn in this context is stanene. The preferred Pb in this context is plumbene. The preferred Sb in this context is antimonene. The preferred Bi in this context is bismuthine, b. One ormore transition metal chalcogenides, each being a transition metal chalcogenide not listed in a., c. One ormore oxides, each being an oxide ofa species listed in a. or b., d. One ormore atomic intercalated variants, each being an atomic intercalated variant ofa species listed in a. or b., e. One ormore physically, chemically, mechanically and / or electromagnetically functionalised derivatives, each being a chemically functionalised derivative ofa species listed in a. or b..A preferred physical functionalisation is perforation or atomic barrage treatment.A preferred mechanical functionalisation is stretching or stressing.A preferred electromagnetic functionalisation is application ofa voltage. In one aspect ofthis embodiment, the 2-dimensional portion is a combination selected from the group consisting of: a., b., c., d., e., a.+b., a.+c., a.+d., a.+e., b.+c., b.+d., b.+e., c.+d., c.+e., d.+e., a.+b.+c., a.+b.+d., a.+b.+e., a.+c.+d., a.+c.+e., a.+d.+e., b.+c.+d., b.+c.+e., b.+d.+e., c.+d.+e., b.+c.+d.+e., a.+c.+d.+e., a.+b.+d.+e., a.+b.+c.+e., a.+b.+c.+d. and a.+b.+c.+d.+e.. Specically, the 2-dimensional portionmay comprise or be graphene orboron nitride or both.A preferred boron nitride is hexagonal boron nitride. Graphene is preferably chemical vapour deposited. Boron nitride is preferably chemical vapour deposited. In one aspect ofthis embodiment, the 2-dimensional portion comprises graphene, preferably is graphene. In one aspect ofthis embodiment, the 2-dimensional portion comprises boron nitride, preferably is boron nitride. As mentioned earlier, the thickness ofthe 2-dimensional portion is relatively small. For instance, 1mm or less, preferably 10 um or less, more preferably 1000nm or less, more preferably 100nm or less, more preferably 50nm or less. In one aspect ofthis embodiment, more preferably 10nm or less, more preferably 5 nm or less, most preferably 1 nm or less. A minimum thickness may be dened as 25 pm or more, preferably 69pm or more, more preferably 100pm or more. In one aspect ofthis embodiment, the thickness is 1 nm ormore, preferably 3 nm or more, more preferably 5 nm or more, more preferably still 10nm or more. In another aspect ofthis embodiment, the thickness is 15 nm or more, preferably 20nm or more, more preferably 30nm or more. Accordingly, the 2-dimensional portionmay be relatively light per unit area, such as 24 kg / m2 or less, preferably 2.4-10l kg / m2 or less, more preferably 2.4-102 kg / m2 or less, more preferably 2.4-103 kg / m2 or less, most preferably 1.2-103 kg / m2 or less.A lower limit on the same weight per unit area is 1.7-109kg / m2 or more, preferably 3.4-108kg / m2 or more, more preferably 1.8-107kg / m2 or more. In one aspect ofthis embodiment, the mean density is 5-107kg / m2 or more, preferably 1.5-106kg / m2 ormore, more preferably 5.4-106kg / m2 or more, more preferably 5.7-105 kg / m2 or more. Various operational principles for the means are available, and have been identied throughout the previous paragraphs. It is noted that some operational principles may allow exerting a force on the cover only in one direction, whereas for others the same means can be used to exert forces in opposing or even various directions on the cover. In case the operational principle only allows forces in a single direction, further means, whichmay be identical, may be applied on the opposite side ofthe cover, e.g. in a mirrored position with respect to the previously mentioned means, so that collectively control can be exerted in both ormore directions. While above an optical element has been described that has means congured to affect the cover, the inverse is also possible and envisaged. Accordingly, the means may alternatively or additionally be arranged to provide an output that is representative ofthe cover changing from the rst cover contour prole to the further cover contour prole. In this manner, the optical element can be used as a sensor responsive to any phenomenon, not necessarily optical, that changes the cover shape. For instance, incident radiation, pressure, sound waves, an electrical charge, temperature, etc. could all be sensed using suitable means. As an example, an electrode could be used to sense a changing electrical charge, e.g. changing in response to a charged cover moving. Ifa predetermined and externally applied electrical charge is applied to the cover, the electrodes could be used to measure deformation ofthe coverby capacitive means, for instance as a result ofincoming radiation or pressure. An electrode or other type ofsensing means would be necessary to measure the changing electric eld as the charged covermoves. In these circumstances, the element described herein need not be described as an optical element per se. Ofcourse the submeans can still be applied, in order to make more accurate ormore complete readings ofthe state ofthe cover. Similar considerations apply for applying the features described-above in relation to the submeans being used to move or deform the cover. As a further remark, it is noted that the structure described herein as optical element can be used in a different and novel way as well, regardless ofwhether or not the characterizing portion of the claims is applied. In this novel way ofusing the device, a substrate opposite the cover is necessary, so that a cavity is formed between the cover and the substrate. The device is congured to allow entry ofelectromagnetic radiation, such as (visible) light, into the cavity between the support and the substrate, and to allow egress ofthe same, also between the support and the substrate. In contrast to the principles shown above, in which light interacts by being incident the cover (either from the rst or second surface), the lightnow travels substantially parallel to the cover, through the cavity. In this case, the cavity acts like a waveguide. To form a waveguide, the skilled person is able to choose suitable materials for the support, the substrate and the material at the covers rst surface and optionally for material to ll the cavity with, so that the light is inuenced by the cover. This inuence could for example result in a change in amplitude, phase or the state ofthe light. Suitably chosen characteristics, such as optical characteristics, ofthe cover allow interaction with light passing through the cavity. By changing the contour shape ofthe cover, orby changing its position, the waveguide formed in the cavity can be altered. The changing inuence ofthe cover on waves passing through can be used to modulate the light. It is noted that the cover need not actually move or change shape in order to affect the passing light differently. For instance, its strain may be altered for instilling different optical properties. The invention will be further elucidated with reference to the attached drawings, in which: Figures 1A, 1B and 1C show schematically interaction oflight with an optical element known in the state ofthe art, Figures 2A, 2B and 2C show schematically interference interaction oflight with an optical elementknown in the state ofthe art, Figures 3A, 3B, 3C and 3D show schematically examples ofdifferent cover shapes achieved by the invention, Figures 4 6 show schematically and in plan view different congurations for the submeans in an optical element, Figure 7 shows schematically an optical element with chamfered support, Figures 8 and 9 show schematically an optical element for different interferometric effects, and Figure 10 shows schematically in perspective view anotherway ofusing the optical element. Figure 1A shows interaction oflight with ofa at cover 101, which is supported by supports 104. The parallel rays 601 and 602 are both deected by the same angle and remain parallel after interaction with the cover 101. This constitutes specular reection. Figure 1B shows interaction oflight with a convex cover. Due to the rounded convex cover contour prole, a rst ray 601 is deected by almost 180° and the second ray 602 is only deected by a small angle. The rays 601 and 602 are no longer parallel after reection at the cover. This constitutes diffuse reection. Figure 1C shows interaction oflight with a concave cover. Due to the rounded concave cover contour prole, a rst ray 601 is deected by an angle less than 90° and the second ray 602 is deected by almost 180°. The rays 601 and 602 are no longer parallel after reection at the cover. This constitutes diffuse reection. Figure 2A shows interference interaction with a at cover. Aside from the supports 104, a substrate 106 is also present in this example ofthe state ofthe art, which lies on the bottom ofthe optical element. The support 104, cover 101 and substrate 106 dene a cavity having a depth 205. The substrate 106 is transmissive and absorbing to an extent and the cover 101 is reective, such that an incoming ray 601 undergoes interference which is dependent on the depth 205. Figure 2B shows interference interaction with a convex cover. The cover 101 ofthe optical element ofgure 12 has been deformed into a convex shape (cover contour prole). This was brought aboutby ameans pushing the cover 101 upwards. This increases the depth 205 and the interference behaviour ofincoming light 601 is altered. Figure 2C shows interference interaction with a concave cover. The cover 101 ofthe optical element ofgure 12 has been deformed into a concave shape (cover contour prole). This was brought aboutby the means pushing the cover 101 downwards. This decreases the depth 205 and the interference behaviour ofincoming light 601 is altered. Now rst referring to gures 8 and 9, it is noted that depending on the optical properties of the cover 101 and the substrate 106, different operational principles are also usable for inuencing incident light. Figure 8 for instance, shows an optical element similar to that ofgures 1 and 2, but with a cover 101 that is relatively absorbing, and a substrate 106 that that is relatively reective. As a result, incident light 601 transmitted 602 through the cover 101 interacts with light reected 604 from the substrate to form a pattern ofnodes and antinodes. The cover can be controlled by means (not shown) to be placed at or away from a node or antinode, to accordingly absorb strongly or less strongly light, so that the intensity ofexiting light 605 can be controlled. In gure 9 a cover 101 is present that is both transmissive and reective, and a substrate that is reective. Accordingly, use can be made ofinterferometric reection, similar to gures 2A 2C, however now the optical element is congured for light incident the cover 101. Otherwise, the optical elementmay be identical to that described above. Figure 3A shows an optical element 99 with a cover 1 supported by a support 4. An optional substrate 6 is also shown. Means 7, 8, 9 are provided to interact with the cover 1. The means 7, 8, 9 in this case consist ofsubmeans 7, submeans 8, and submeans 9, which for this particular example are identical, although this is not required. They submeans 7, 8, 9 are electrodes as an example. The electrodes are wired to a controller 12 via a set ofwires 13 on the one hand, and connected to earth 14 on the other side. Accordingly, a voltage can be applied to the electrodes 7, 8, 9 by the controller 12. The controller 12 is congured to individually control the voltage on each electrode 7, 8, 9. Due to the voltage, the submeans 7, 8, 9 will enact a force on the cover 1, which changes the cover shape. Reference isnow made to gures 3B 3D, in which the same optical element 99 is shown. In gure 3B, the submeans 7, 8, 9 are provided with a voltage increase for each submeans from left to right, so that the cover 1 is lowest on the right, and less low on the left, above the rst submeans 7. Alternatives are shown in gure 3C, where the cover 1 is also shown in different positions l and 1 to indicate that depending onhow the submeans 7, 8, 9 are operated, different shapes ofthe cover 1 can be achieved. Figure 3D shows that the submeans need not be operated to facilitate movement in the same direction per se, so that even more exotic cover shapes can be made. In this case, it helps ifan operational principle for the submeans 7, 8, 9 is chosen that is capable of attracting and repelling the cover 1. As an example, the cover can be charged, so that the electrodes 7, 8, 9 can be provided with corresponding or opposing charge to create repelling or attracting forces. As was described above, multiple congurations ofsubmeans can be employed. Non- limiting examples are shown in gures 4 6, in each case with submeans 7 11 on a substrate 6. Ofcourse, the submeans could also be in the substrate, as is the case for all submeans described throughout the application. In gure 4, the submeans 7 10 are laid out in register, i.e. in rows and columns. In this case the rows and columns are perpendicular to form a rectangular matrix, in this case square. In gure 5, a central submeans 7 is provided and surrounded by a submeans 8 at a radial distance from the central submeans 7. The submeans 8 in this case are ring-shaped.A variation is shown in gure 6, which shows a central submeans 7, but multiple submeans 8 11 at a radial distance in each comer ofthe substrate. Finally, reference is made to gure 10, which shows a perspective view ofa device, such as an optical element, similar to that described herein. Like before, the device has a substrate 106 and support 104, which in this case are monolithic. The support 104 denes a cavity C that is of longitudinal shape in this example. Cover 101 held by the support 104 spans the cavity C. Materials for the support 104, the substrate 106, the material at the covers rst surface and material with which the cavity C is lled are chosen so that the cavity C acts as a waveguide. Incidentwaves 601, such as light, can therefore pass through from one side to another, and egress as exited light 602. Viameans 107, in this case presented on top ofthe support 104, although not strictly necessary, the cover 101 can be moved, or its cover contour prole changed. As a result, the cover 101 at least locally inuences the light passing through the cavity C in order to modulate it. It is noted thatterms like preferably, generally and typically are not utilized herein to limit the scope ofthe claims or to imply that certain features are critical, essential, or even important to the structure or function ofthe claims. Rather, these terms are merely intended to highlight alternative or additional features thatmay ormay not be utilized in a particular embodiment ofthe present disclosure. Likewise, forthe purposes ofdescribing and dening the present disclosure, it is noted that the terms substantially and approximately and their variants are utilized herein to represent the inherent degree ofuncertainty thatmay be attributed to any quantitative comparison, value, measurement or other representation, as well as to represent the degree by which a quantitative representationmay vary without resulting in a change in the basic function ofthe subject matter at issue. While certain representative embodiments and details have been shown forpurposes of illustrating the present disclosure, it will be apparent to those skilled in the art that various changes may be made without departing from the scope ofthe disclosure, which is dened in the appended claims. 5

Claims

1. Optical element comprising: a. a covering with a first and a second surface, b. a support, and c. a means, whereby: - the cover is oriented with the first surface facing the support, - a part of the first surface is attached to the support, - a spatial arrangement of the deck considered in a cross-section of the cover defines a cover contour profile, - the device is designed to move the cover from a first cover contour profile to a further cover contour profile that differs from the first covering contour profile, and / or the device is designed to provide an output that is representative of changing the cover of the first cover contour profile to the further cover contour profile, whereby the product comprises at least two separate sub-products.

2. Optical element according to the previous conclusion, where the at least two separate sub-tools are based on a different operational principle.

3. Optical element according to one of the preceding claims, where each of the at least has two separate sub-agents an effective range, which is defined as the part of the covering on which the agent acts, whereby the effective range of each of the at least is different between two separate sub-agents.

4. Optical element according to one of the preceding claims, where the sub-means can be managed individually.

5. Optical element according to one of the preceding claims, where the at least two separate sub-components are located at substantially equal distances from the cover.

6. Optical element according to one of the preceding claims, further comprising a substrate on one side of the support opposite the cover.

7. Optical element according to the previous claim, where each of the at least two separate substrates have been applied in or on the substrate.

8. Optical element according to one of the preceding claims, where the at least two separate sub-tools are arranged in a register, as in a rectangular matrix, or preference in a square matrix.

9. Optical element according to one of the preceding claims, where the at least two separate sub-products are identical.

10. Optical element according to one of the preceding claims, where the at least two separate sub-components comprise a central sub-component that is centrally placed at relative to the cover, and one or more radial sub-means arranged radially at relative to the central sub-means.

11. Optical element according to one of the preceding claims, where the sub-means jointly cover an area equal to at least 50% of a surface area of ​​the first surface area of ​​the covering, preferably at least 60%, and preferably at least 70%.

12. Optical element according to one of the preceding claims, where each of the at least two separate substances an electrical component comprises, such as an electrode.

13. Optical element according to one of claims 1 11, where each of the at least two separate sub-products comprises one or more of: - an optical actuator, such as optical tweezers or a photonic circuit, - a means of applying or altering incident radiation on the covering, such as a radiation source. - a means of influencing a gas pressure acting on the cover, - a loudspeaker or other sound source, - a thermal actuator, operating by thermal expansion, and - an electromagnetic and / or superconducting actuator, for example operating on the basis of tunneling or field emission.

14. Optical element according to one of the preceding claims, further comprising one or more electrical circuits connected to each of the at least two separate sub-means, where the one or more electrical circuits are configured to handle a different current and / or voltage to be delivered to each of the at least two separate sub-agents.

15. Optical element in accordance with one of the preceding claims, where the support is beveled on a side facing the cover, preferably towards the center thereof.

16. Procedure for operating an optical element according to one of the preceding conclusions, comprising the different operation of each of the at least two separate sub-materials, whereby the shape of the cover contour profile changes.

17. Use of an optical element pursuant to one of claims 1 15 for beam steering, splitting, distortion, shift, focusing and / or magnification in optical systems and / or photonic integrated circuits.

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