Microelectromechanical system component or microfluidic component, device and method

Abstract

The invention relates to a microelectromechanical system component or microfluidic component, comprising a substrate layer of a first material, preferably a silicon material, more preferably a doped silicon material, yet more preferably a p+ doped silicon material. The substrate layer is provided with a first microchannel for conducting a fluid. The microchannel is free-hanging or free-standing. The component further comprises at least one protrusion protruding into said microchannel from the upper side of the microchannel and in a direction substantially transverse to the substrate layer. Advantageously, the protrusion is made at least partly of the first material and / or integrally formed with the substrate layer. Fig. 2