Latch mechanism and non-equilateral rectangular reticle container having the same

Abstract

OF THE DISCLOSURE Provided is a latch mechanism adapted for use in a door of a non-equilateral rectangular reticle container. The latch mechanism includes a driving member disposed at the door, and a plurality of driven assemblies respectively abutting against the driving member. When the driving member rotates, the plurality of driven assemblies are synchronously actuated to undergo reciprocating movement to protrude from or retract into the door, such that at least one of the plurality of driven assemblies is configured to lock or unlock a lateral position on the door of the nonequilateral rectangular reticle container. (FIG.2A)

Description

BACKGROUND OF THE INVENTION FIELD OF THE INVENTION

[0001] The present disclosure relates to latch mechanisms, and more particularly to a latch mechanism for use in a non-equilateral rectangular reticle container. DESCRIPTION OF THE PRIOR ART

[0002] As high-numerical-aperture (High-NA) extreme ultraviolet (EUV) lithography technologies advance, the dimensions of reticles increase. Accordingly, there is a need for reticle containers having larger, non-equilateral rectangular sizes. In existing reticle containers, the latch mechanism operates through engagement of a central cam with a load port, such that rotation of the cam drives two sets of latch mechanisms. As shown in FIG. 10, FIG. 10 illustrates a door 800 of a conventional reticle container. The latch mechanism of the conventional reticle container includes a cam 80 and two latch members 82. Rotation of the cam 80 causes the latch members 82 to protrude from, or retract into, the door 800. The weight of the reticle container increases with its overall size, for example in a 6><12- size reticle container, the existing Iatch mechanism is insufficient to stably secure the door to the housing. Portions of the door not constrained by the latch mechanism become longer, leading to poor sealing performance, door deformation, or difficulties in opening and closing the reticle container. When applied to large reticle containers, for example, a 6X12-size reticle container, the existing latch 1 mechanism is insufficient to stably secure the door to the housing. Portions of the door not constrained by the latch mechanism become longer, leading to poor sealing performance, door deformation, or difficulties in opening and closing the reticle container. SUMMARY OF THE INVENTION

[0003] To address the foregoing issues, the disclosure provides a latch mechanism adapted for a non-equilateral rectangular reticle container. The latch mechanism disclosed herein is compatible with existing load ports to eliminate the need for manufacturers to purchase additional equipment. In addition, the latch mechanism improves the sealing performance of non-equilateral rectangular reticle containers.

[0004] The disclosure provides a Iatch mechanism, adapted for a door of a non- equilateral rectangular reticle container, comprising: a driving member disposed at the door; a plurality of driven assemblies respectively abutting against the driving member, wherein, when the driving member rotates, the plurality of driven assemblies are synchronously actuated to undergo reciprocating movement to protrude from or retract into the door, such that at least one of the plurality of driven assemblies is configured to lock or unlock a side of the door of the non-equilateral rectangular reticle container.

[0005] In a specific embodiment, the plurality of driven assemblies are configured to lock or unlock long sides of the door of the non-equilateral rectangular reticle container. 2

[0006] In a specific embodiment, the plurality of driven assemblies are respectively disposed on opposite sides of the door and operably coupled to the driving member, and each of the plurality of driven assemblies comprises a driven member and a latch member, the driven member having a connecting rib, one end of the connecting rib connected to the driving member and the other end of the connecting rib connected to the latch member, such that, when the driving member rotates, the driven members are synchronously actuated, allowing the latch members to protrude from or retract into the door.

[0007] In a specific embodiment, when the driving member rotates, the driven members are synchronously actuated, allowing the connecting ribs to undergo lateral linear movement and push the latch members to move longitudinally toward the sides of on the door, allowing the latch members to protrude from or retract into the door.

[0008] In a specific embodiment, each of the connecting ribs has two opposite inclined surfaces, and the latch members are actuated by the connecting ribs to slide along the inclined surfaces respectively, allowing the latch members to protrude from or retract into a lateral side of the door.

[0009] In a specific embodiment, each of the plurality of driven assemblies comprises a connecting rib, at least one long-side Iatch member, and at least one short-side latch member, one end of the connecting rib connected to the driving member, with the long-side Iatch member disposed on long sides of the door, and with the short-side latch member disposed on short sides of the door, wherein, when the driving member rotates, the plurality of driven assemblies are synchronously actuated to cause the connecting ribs to undergo lateral linear movement to synchronously push the long-side latch member toward the long sides of the door 3 and the short-side latch member toward the short sides of the door, allowing the long-side Iatch member and the short-side Iatch member to protrude from or retract into the door simultaneously.

[0010] In a specific embodiment, each of the connecting ribs has two opposite inclined surfaces corresponding in position to the long-side latch members, and ends of the connecting ribs are positioned distal to the driving member and respectively connected to the short-side Iatch members, and wherein the connecting ribs actuate the long-side Iatch members to slide along the inclined surfaces to protrude from or retract into the long sides of the door, and actuate the short-side Iatch members to protrude from or retract into the short sides of the door.

[0011] In a specific embodiment, ends of the connecting ribs are positioned distal to the driving member and respectively connected to the short-side latch members, synchronizing the lateral linear movement of the short-side latch members with the movement of the connecting ribs.

[0012] In a specific embodiment, when the plurality ofdriven assemblies have the plurality of short-side Iatch members, the short-side latch members are coupled to the connecting rib through a connection portion, synchronizing movement of the short-side latch members with the connecting ribs.

[0013] In a specific embodiment, each of the plurality of driven assemblies comprises a driven member and at least one latch member, and wherein the driving member and the driven members are transmission wheels configured to mutually drive each other to transmit power, and wherein, when the driving member rotates, the driven assemblies are synchronously actuated to rotate, allowing the latch member to protrude from or retract into the door. 4

[0014] In a specific embodiment, the driving member comprises a first toothed surface, and each of the driven members comprises a second toothed surface, and wherein the first toothed surface and the second toothed surface are arranged in meshing engagement such that, when the driving member rotates, the driven members are synchronously actuated to rotate.

[0015] In a specific embodiment, each of the plurality of driven assemblies comprises two of the driven members, and the two driven members are spaced apart and positioned proximate to short sides of the door.

[0016] In a specific embodiment, each of the plurality of driven assemblies comprises at least one long-side Iatch member, and at least one short-side Iatch member, with the long-side latch member disposed on long sides of the door, and with the short-side latch member disposed on short sides of the door.

[0017] In a specific embodiment, the driving member is disposed in a central region of the door, with the central region defined by a length and a width respectively equal to 0.9 times a length of the non-equilateral rectangular reticle and 0.9 times a width of the non-equilateral rectangular reticle, and a center of the central region is aligned with a geometric center of the door.

[0018] The disclosure further provides a non-equilateral rectangular reticle container comprising the latch mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] FIG. 1A is a perspective view of a non-equilateral rectangular reticle container (a dual-pod reticle container).

[0020] FIG. 1B is an exploded view based on FIG. 1A. 5

[0021] FIG. 2A is a schematic view of a latch mechanism in a locked state according to the first embodiment of the disclosure.

[0022] FIG. 2B is a schematic view of the latch mechanism in an unlocked state according to the first embodiment of the disclosure.

[0023] FIG. 3A is a schematic view of the latch mechanism in a locked state according to the second embodiment of the disclosure.

[0024] FIG. 3B is a schematic view of the latch mechanism in an unlocked state according to the second embodiment of the disclosure.

[0025] FIG. 4A is a schematic view of the latch mechanism in a locked state according to the third embodiment of the disclosure.

[0026] FIG. 4B is a schematic view of the latch mechanism in an unlocked state according to the third embodiment of the disclosure.

[0027] FIG. 5A is a schematic view of the latch mechanism in a locked state according to the fourth embodiment of the disclosure.

[0028] FIG. 5B is a schematic view of the latch mechanism in an unlocked state according to the fourth embodiment of the disclosure.

[0029] FIG. 6A is a schematic view of the latch mechanism in a locked state according to the fifth embodiment of the disclosure.

[0030] FIG. 6B is a schematic view of the latch mechanism in an unlocked state according to the fifth embodiment of the disclosure.

[0031] FIG. 7A is a schematic view of the latch mechanism in a locked state according to the sixth embodiment of the disclosure.

[0032] FIG. 7B is a schematic view of the latch mechanism in an unlocked state according to the sixth embodiment of the disclosure. 6

[0033] FIG. 8A is a schematic view of the latch mechanism in a locked state according to the seventh embodiment of the disclosure.

[0034] FIG. 8B is a schematic view of the latch mechanism in an unlocked state according to the seventh embodiment of the disclosure.

[0035] FIG. 9A is a schematic view of the latch mechanism in a locked state according to the eighth embodiment of the disclosure.

[0036] FIG. 9B is a schematic view of the latch mechanism in an unlocked state according to the eighth embodiment of the disclosure.

[0037] FIG. 10 (PRIOR ART) is a schematic view of a conventional reticle container and Iatch mechanism. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] Referring to FIGS. 1A and 18, there are shown a perspective view and an exploded view of a non-equilateral rectangular reticle container respectively. The non-equilateral rectangular reticle container comprises an outer pod, and an inner pod received in the outer pod. The outer pod comprises a door 90, and a casing 91 engaged with the door 90. The inner pod comprises a baseplate 92, and a cover 93 engaged with the baseplate 92. The disclosure provides a latch mechanism for use in the non-equilateral rectangular reticle container. The latch mechanism is disposed in the door 90 and configured to selectively lock the casing 91 to, or unlock the casing 91 from, the door 90. The latch mechanism comprises a driving member operably engageable with a plurality of driven assemblies. When the driving member rotates, the plurality of driven assemblies are synchronously actuated to undergo reciprocating movement to protrude from or retract into the door 90, such 7 that the plurality of driven assemblies are configured to lock or unlock a side of the door of the non-equilateral rectangular reticle container. The structural features and operation of different embodiments of the latch mechanism are described later.

[0039] Referring to FIGS. 2A and 28, there are shown schematic views of a latch mechanism in a locked state and an unlock state according to the first embodiment of the disclosure respectively.

[0040] In the first embodiment of the disclosure, a latch mechanism is disposed in the door 90 of a non-equilateral rectangular reticle container. The door 90 has two long sides 901A and 9018 and two short sides 902A and 9028. The latch mechanism comprises a driving member 10 and a plurality of driven assemblies. The driving member 10 is disposed in a central region of the door 90 and configured to synchronously drive the plurality of driven assemblies to operate. The central region is defined by a length and a width respectively equal to 0.9 times a length of the non-equilateral rectangular reticle and 0.9 times a width of the non-equilateral rectangular reticle. The center of the central region is aligned with the geometric center of the door 90. Preferably, the driving member 10 is substantially disposed at the geometric center of the door 90.

[0041] In the first embodiment, the driving member 10 is a cam, and two of the plurality of driven assemblies are respectively disposed on opposite sides of the door 90 (for example, long sides 901A and 9018) and operably coupled to the driving member 10. The plurality of driven assemblies each comprise at least one driven member 20A, 208 and a latch member 23A-23D. Each driven member 20A, 208 has at least one connecting rib 21A-21 D. For example, the connecting ribs 21A and 21 B of the driven member 20A extend from the driving member 10 toward the long side 901A to define an angle 6, thereby forming a substantially V-shaped 8 structure. The latch members 23A and 238 are connected to respective ends of the connecting ribs 21A and 218 respectively. Likewise, the connecting ribs 21C and 21 D of the driven member 208 extend from the driving member 10 toward the long side 9018 to define an angle 6, thereby form a substantially V-shaped structure. The latch members 230 and 23D are connected to respective ends of the connecting ribs 21A and 218 respectively. The latch members 23A-23D are configured to engage with a corresponding receiving portion of the casing. Preferably, the angle 9 is a right angle or an obtuse angle, that is, 6 is greater than or equal to 90°, such that two of the latch members 23A-23D are spaced apart by a distance while protruding from two positions on one of the long sides 901A and 9018.

[0042] In the first embodiment, when the driving member 10 rotates, for example, in the clockwise direction or in the counterclockwise direction, the two driven members 20A, 208 are synchronously actuated to undergo linear movement. As shown in FIG. 2A, the Iatch members 23A-23D protrude outward from the two long sides 901A and 9018 of the door 90 and engage the corresponding receiving portions (not shown) of the casing respectively, thereby locking the casing. As shown in FIG. 28, the latch members 23A-23D are retracted inward into the long sides 901A and 9018 of the door 90 respectively, thereby unlocking the casing. Therefore, the driving member 10 actuates the two driven members 20A, 208 to undergo reciprocating movement, such that at least one of the latch members 23A- 23D is capable of locking or unlocking the door 90 of the non-equilateral rectangular reticle container at two positions on at least one of the long sides 901A and 901 B.

[0043] Referring to FIGS. 3A and 38, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the second 9 embodiment of the disclosure respectively. In the second embodiment, the latch mechanism is disposed in the door 90 of the non-equilateral rectangular reticle container. The door 90 has two long sides 901A and 901 B and two short sides 902A and 9028. The latch mechanism comprises the driving member 10 and the plurality of driven assemblies. The plurality of driven assemblies are disposed on two opposite short sides 902A and 9028 of the door 90 respectively. The plurality of driven assemblies each comprise a driven member that comprises a driven member 20A and 208 and at least one latch member 31A-31D. The driven members 20A and 208 have connecting ribs 21A and 218 respectively, with one end connected to the driving member 10, and with the other end connected to at least one latch member 31A-31D. The latch members are disposed on the long sides 901A and 901 B of the door 90. More particularly, the connecting rib 21A of the driven member 20A extends from the driving member 10 toward the short side 902A by a length and is configured to abut against the latch members 31A and 31B. Likewise, the connecting rib 21 B of the driven member 208 extends from the driving member 10 toward the short side 9028 by a length and is configured to abut against the latch members 310 and 31 D. When the driving member 10 rotates, the driven members 20A and 208 are synchronously actuated, allowing the connecting ribs 21A and 218 to undergo lateral linear movement toward the short sides 902A and 9028 respectively. The connecting rib 21A moving toward the short side 902A simultaneously pushes the latch member 31A to move longitudinally toward the long side 901A and pushes the Iatch member 31 B to move longitudinally toward the long side 901B. The connecting rib 21B moving toward the short side 9028 simultaneously pushes the latch member 310 to move longitudinally toward the long side 901A and pushes the latch member 31D to move longitudinally toward 10 the long side 9018. Therefore, the driving member 10 actuates the two driven member 20A, 208 to undergo reciprocating movement, such that the latch members 31A-31D synchronously protrude from or retract into the door 90, thereby locking or unlocking two positions on the long sides 901A and 901 B of the door 90 of the non-equilateral rectangular reticle container.

[0044] In the second embodiment, the connecting rib 21A of the driven member 20A has two opposite inclined surfaces 25A and 258, and the connecting rib 218 of the driven member 208 has two opposite inclined surfaces 250 and 25D, allowing the latch members 31A-31 D to abut against the inclined surfaces 25A-25D respectively. The connecting rib 21A of the driven member 20A has two inclined surfaces 25A and 258, allowing the latch member 31A to abut against the inclined surface 25A, and allowing the latch member 318 to abut against the inclined surface 258. The connecting rib 21B of the driven member 208 has two opposite inclined surface 25C and 25D, allowing the latch member 31C to abut against the inclined surface 25C, and allowing the latch member 31D to abut against the inclined surface 25D. The latch members 31A and 318 are actuated by the connecting rib 21A to slide along the inclined surfaces 25A and 258 respectively. The latch members 310 and 31D are actuated by the connecting rib 218 to slide along the inclined surfaces 25C and 25D respectively. When the driving member 10 rotates, the connecting ribs 21A and 218 of the driven members 20A and 208 are synchronously actuated to undergo lateral linear movement toward the short sides 902A and 9028 respectively. The lateral movement of the connecting ribs 21A and 218 causes the latch members 31A-31 D to slide along the differently oriented sides 25A-25D respectively. Finally, the latch members 31A-31D longitudinally move 11 toward the long sides 901A and 9018 of the door 90, protruding therefrom so as to lock as shown in FIG. 3A, or retracting therein so as to unlock as shown in FIG. 38.

[0045] Referring to FIGS. 4A and 48, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the third embodiment of the disclosure respectively. Only the differences, not the similarities, between the third and second embodiments are described below. The second embodiment is directed to locking and unlocking the long sides 901A and 9028 of the door 90. The third embodiment is directed to locking and unlocking the long sides 901A and 9028 and the short sides 902A and 9028 of the door 90 simultaneously.

[0046] In the third embodiment, the plurality of driven assemblies each exhibit structural features capable of locking long sides and short sides simultaneously. More particularly, the plurality of driven assemblies each comprise the driven members 20A and 208, at least one of the long-side latch members 31A-31 D, and at least one of short-side latch members 26A and 268. The connecting rib 21A of the driven member 20A extends a distance from the driving member 10 toward the short side 902A. The long-side latch members 31A and 31B are disposed on the long sides 901A and 9018 of the door 90 respectively, with the short-side latch member 26A disposed on the short side 902A of the door 90. The connecting rib 21B of the driven member 208 extends a distance from the driving member 10 toward the short side 9028. The long-side latch members 31C and 31D are disposed on the long sides 901A and 9018 of the door 90 respectively, with the short-side latch member 268 disposed on the short side 9028 of the door 90. When the driving member 10 rotates, the driven members 20A and 208 are synchronously actuated. Thus, the connecting rib 21A of the driven member 20A undergoes lateral 12 linear movement to synchronously push the long-side Iatch member 31A toward the long side 901A of the door, the long-side latch member 318 toward the long side 901 B of the door, and the short-side latch member 26A toward the short side 902A of the door. Likewise, the connecting rib 218 of the driven member 208 undergoes lateral linear movement to synchronously push the long-side latch member 310 toward the long side 901A of the door, the long-side latch member 31 D toward the long side 9018 of the door, and the short-side latch member 268 toward the short side 902B ofthe door. Therefore, in the third embodiment, when the driving member 10 rotates (for example, clockwise rotation or counterclockwise rotation defines a locked state or an unlocked state), the connecting ribs 21A and 218 of the driven members 20A and 208 undergo lateral linear movement, such that the long-side latch members 31A-31D and the short-side latch members 26A and 26B protrude from or retract into the long sides 901A and 9018 and the short sides 902A and 9028 of the door 90 simultaneously and respectively, thereby locking or unlocking side positions of the door 90 of the non-equilateral rectangular reticle container. The long-side latch members 31A-31 D and short-side latch members 26A and 268 are configured to engage the corresponding receiving portion of the casing so as to securely connect the long sides 901A and 901 B and the short sides 902A and 9028 of the door with the casing.

[0047] Referring to FIGS. 5A and 58, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the fourth embodiment of the disclosure respectively. Only the differences, not the similarities, between the fourth and third embodiments are described below. In the third embodiment, the driven members 20A and 208 have a single short-side latch member 26A and 268 respectively, and the connecting ribs 21A and 218 of the 13 driven members 20A and 208 have ends which are positioned distal to the driving member 10 and respectively connected to the short-side latch members 26A and 26B, thereby synchronizing the lateral linear movement of the short-side latch members with the movement of the connecting ribs. In the fourth embodiment, the driven member 20A has the plurality of short-side Iatch members 33A-338, and the driven member 208 has the short-side latch members 33C-33D.

[0048] In the fourth embodiment, the driven member 20A and 208 further comprises a connection portion 27A and 278 respectively, which serve as connecting structures between the plurality of short-side latch members 33A-33D and the connecting ribs 21A and 218. More particularly, the connecting rib 21A of the driven member 20A is coupled to the short-side latch members 33A and 338 through the connection portion 27A. The short-side latch members 33A and 338 are spaced apart and disposed on one side of the connection portion 27A, and are oriented toward the short side 902A of the door 90. Likewise, the connecting rib 218 of the driven member 208 is coupled to the short-side latch members 33C and 33D through the connection portion 278. The short-side latch members 33C and 33D are spaced apart and disposed on one side of the connection portion 278, and are oriented toward the short side 9028 of the door 90. When the driving member 10 rotates (for example, clockwise rotation or counterclockwise rotation defines a locked state or an unlocked state), the connecting ribs 21A and 218 of the driven members 20A and 208 undergo lateral linear movement, thereby synchronizing the lateral linear movement of the short-side latch members 33A-33D with the movement of connecting ribs 21A and 218. The corresponding receiving portions of the casing corresponds in number to the short-side latch members, such that the short sides 902A and 9028 of the door 90 can be firmly connected to the casing. 14

[0049] In the first to fourth embodiments, the driven members each further comprise an elastic member, such as a spring or an elastic structural component, which continuously applies a biasing force to the driven member, thereby forcing the driven member to move toward the long sides and short sides of the door 90. The elastic member enables the reticle container to remain in a locked state, thereby not only preventing malfunction ofan unlocking mechanism of the load port, but also further protecting the reticle.

[0050] Referring to FIGS. 6A and 68, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the fifth embodiment of the disclosure respectively. Only the differences, not the similarities, between the fifth and second embodiments are described below. In the fifth embodiment, the connecting ribs 21A and 218 of the second embodiment are replaced with transmission wheels. More particularly, in the fifth embodiment, the latch mechanism comprises the driving member 10 and the plurality of driven assemblies. The driving member 10 is disposed in a central region of the door 90 and configured to synchronously drive the plurality of driven assemblies to operate. The plurality of driven assemblies comprise the driven members 20A and 208 and latch members 31A-31D. The driving member 10 and the plurality of driven members 20A and 208 are transmission wheels configured to mutually drive each other to transmit power. When the driving member 10 rotates, the driven members 20A and 208 are synchronously driven to rotate, thereby causing the latch members 31A-31 D to protrude from or retract into the door.

[0051] Referring to FIGS. 7A and 78, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the sixth embodiment of the disclosure respectively. Only the differences, not the similarities, 15 among the sixth, fifth, and third embodiments are described below. In the fifth embodiment, locking and unlocking are performed at the long sides 901A and 9028 of the door 90. In the sixth embodiment, locking and unlocking are simultaneously performed at the long sides 901A and 9028 and the short sides 902A and 9028 of the door 90. In the sixth embodiment, the connecting ribs 21A and 218 of the third embodiment are replaced with transmission wheels. When the driving member 10 rotates (for example, clockwise rotation or counterclockwise rotation defines a locked state or an unlocked state), the plurality of driven members 20A and 208 are synchronously actuated, thereby allowing the long-side latch members 31A-31D and the short-side latch members 33A and 338 to protrude from or retract into the door 90.

[0052] Referring to FIGS. 8A and 88, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the seventh embodiment of the disclosure respectively. Only the differences, not the similarities, among the seventh, sixth, and fourth embodiments are described below. In the sixth embodiment, the driven members 20A and 208 each have a single the short-side latch members 33A and 338 respectively. In the seventh embodiment, the driven members 20A and 208 each have the plurality of short-side latch members 33A- 338 and 33C-33D respectively. In the seventh embodiment, the connecting ribs 21A and 21B and connection portions of the fourth embodiment are replaced with transmission wheels. When the driving member 10 rotates (for example, clockwise rotation or counterclockwise rotation defines a locked state or an unlocked state), the plurality of driven members 20A and 208 are synchronously actuated, thereby allowing the long-side latch members 31A-31D and the short-side latch members 33A-33D to protrude from or retract into the door 90. 16

[0053] Referring to FIGS. 9A and 98, there are shown schematic views of the latch mechanism in a locked state and an unlock state according to the eighth embodiment of the disclosure respectively. In the eighth embodiment, the driving member 10 and the plurality of driven members 20A-20D are transmission wheels configured to mutually drive each other to transmit power. The door 90 has two long sides 901A and 9018 and two short sides 902A and 9028. The driven members 20A-20D of the plurality of driven assemblies are positioned proximate to four corners of the door 90 respectively and configured not to interfere with each other. The driven members 20A and 20C are positioned on one side of the driving member 10, and the driven members 208 and 20D are positioned on the other side of the driving member 10. The driven members 20A-20D each comprise one long-side latch member and one short-side latch member.

[0054] More particularly, the latch mechanism comprises the driving member 10 and the plurality of driven assemblies. The plurality of driven assemblies each comprise two of the driven members 20A-20D, two of the long-side Iatch members 31A-31 D, and two of the short-side Iatch members 33A-33D. The plurality of driven assemblies positioned on one side of the driving member 10 comprise two driven members 20A and 20C spaced apart and positioned proximate to the short side 902A of the door. The driven member 20A is connected to the long-side latch members 31A and short-side latch member 33A, allowing the long-side latch member 31A to be disposed on the long side 9018, and allowing the short-side latch member 33A to be disposed on the short side 902A. The driven member 200 is connected to the long-side Iatch members 310 and short-side latch member 33C, allowing the long-side Iatch member 310 to be disposed on the long side 901A, and allowing the short-side latch member 330 to be disposed on the short side 902A. 17

[0055] More particularly, the plurality of driven assemblies positioned on the other side of the driving member 10 comprise two driven members 208 and 20D spaced apart and positioned proximate to the short side 9028 of the door. The driven member 208 is connected to the long-side latch member 318 and the short-side latch member 338, allowing the long-side latch member 318 to be disposed on the long side 9018, and allowing the short-side latch member 338 to be disposed on the short side 9028. The driven member 20D is connected to the long-side latch member 31D and the short-side latch member 33D, allowing the long-side latch member 31D to be disposed on the long side 901A, and allowing the short-side latch member 33C to be disposed on the short side 9028.

[0056] The rotation of the driving member 10 synchronously actuates four driven members 20A-20D to rotate , thereby causing the four short-side latch members 33A-33D to protrude outward from the short sides 902A and 9028 of the door 90 or retract inward into the short sides 902A and 9028 of the door 90, and simultaneously causing the four long-side latch members 31A-31D to protrude outward from the long sides 901A and 9018 of the door 90 or retract inward into the long sides 901A and 9018 of the door 90, respectively, to lock or unlock the door 90.

[0057] In the fifth to eighth embodiments, the driving member and the plurality of driven members are preferably transmission wheels. For instance, the driving member comprises a first toothed surface, and the driven members each comprise a second toothed surface. The first toothed surface and the second toothed surface are arranged in meshing engagement such that, when the driving member rotates, the driven members are synchronously actuated to rotate under the meshing force. 18

[0058] In the fifth to eighth embodiments, the latch members each further comprise an elastic member, such as a spring or an elastic structural component, which continuously applies a biasing force to the latch members, thereby forcing the latch members to move toward the long sides and short sides of the door 90. The elastic member enables the reticle container to remain in a locked state, thereby not only preventing malfunction ofan unlocking mechanism of the load port, but also further protecting the reticle. 19

Claims

1. Locking mechanism, adapted for a non-equilateral door rectangular reticle container, comprising: a drive device mounted at the door; a multitude of driven assemblies that are respectively adjacent against the driving element, whereby, when the driving element rotates, the multitude of driven assemblies are actuated synchronously to reciprocate to undergo movement to protrude from or retract into the door, such that to at least one of the multitude of driven assemblies is configured around a side to lock the door of the non-equilateral rectangular reticle container or unlock.

2. Locking mechanism according to claim l, where the multiplicity of driven assemble be configured to long sides of the door of the non-equilateral to lock or unlock rectangular reticle container.

3. Locking mechanism according to claim l, where the multiplicity of driven compose respectively are applied on opposite sides of the door and be actively coupled to the drive element, and each of the multitude of driven comprising a driven mechanism and a locking mechanism, whereby the driven organ has a connecting rib, one end of the connecting rib connected with the drive element and the other end of the connecting rib connected to the locking device, such that, when the driving device rotates, the driven devices be actuated synchronously, allowing the locking mechanisms to protrude from the door or be able to move into the doorway.

4. Locking mechanism within the meaning of claim 3, where, when the driving device rotates, the driven organs are actuated synchronously, whereby the connecting ribs undergo lateral linear movement and push the locking mechanisms to move longitudinally to the sides of the door, causing the locking mechanisms out be able to stick out the door or retract into the door. 20 5. Locking mechanism according to claim 3, where each of the connecting ribs has two opposing inclined surfaces, and the locking mechanisms are actuated are guided by the connecting ribs to run along the inclined surfaces respectively slide, allowing the locking mechanisms to protrude from a side of the door or into a can retract the side of the door.

6. Limiting mechanism according to claim 1, where each of the multiplicity of driven assemblies a connecting rib, at least one long-sided latching element, and comprises at least one short-sided latching device, one end of the connecting rib connected with the drive element, with the long-side locking element mounted on the long sides of the door, and with the short-sided locking device fitted on the short sides of the door, where, when the driving element rotates, the multitude of driven assemblies be actuated synchronously to allow the connecting ribs lateral linear movement to undergo in order to synchronously move the long-side latching device to the long sides of the to push the door and the short-side locking mechanism towards the short sides of the door, whereby the longitudinal locking device and the short-side locking device can extend from the door simultaneously protrude or be able to retract into the door.

7. Locking mechanism according to claim 6, where each of the connecting ribs has two opposing inclined surfaces that correspond in position with the longitudinal locking organs, and ends of the connecting ribs are positioned distally of the drive element and are respectively connected to the short-side locking elements, and where the connecting ribs actuate the long-side locking mechanisms to move along the to slide on sloping surfaces to protrude from the long sides of the door or in the to retract the long sides of the door, and actuate the short-side locking mechanisms to release from the to protrude the short sides of the door or to retract into the short sides of the door.

8. Locking mechanism under claim 6, whereby ends of the connecting ribs are positioned distal to the driving element and respectively connected to the short-side latching devices, synchronizing the lateral linear movement of the short-sided locking mechanisms with the movement of the connecting ribs. 21 9. Limiting mechanism according to claim 6, where, when the multiplicity of driven assemblies have the multitude of short-sided latching mechanisms, the short-sided locking mechanisms are coupled to the connecting rib by a connecting part, Synchronizing movement of the short-sided locking mechanisms with the connecting ribs.

10. Limiting mechanism according to claim 1, where each of the multiplicity of powered assemblies comprise a powered element and at least one locking element, and where the drive unit and the driven units are transmission wheels which be configured to mutually propel each other to transmit power, and where, when the drive element rotates, the driven elements are actuated synchronously be able to rotate, allowing the locking mechanism to protrude from the door or retract into the door can withdraw.

11. Locking mechanism within the meaning of claim 10, where the driving device is a comprises the first toothed surface, and each of the driven bodies a second toothed surface comprises, and where the first toothed surface and the second toothed surface be arranged in a combing pattern such that, when the drive element rotates, the driven organs are actuated synchronously to rotate.

12. Locking mechanism according to claim 10, where each of the multiplicity of powered assemblies comprise two of the powered bodies, and the two powered organs are spaced apart and positioned near the short sides of the door.

13. Limiting mechanism according to claim 1, where each of the multiplicity of driven assemblies a driven organ, at least one long side locking mechanism, and comprises at least one short-side locking mechanism, with the long-side locking device fitted to the long sides of the door, and with the short-side locking device mounted on the short sides of the door, where the drive element and the driven organs are transmission wheels that are configured to drive each other mutually to transmit force, and whereby, when the driving element rotates, the driven organs are actuated synchronously to rotate, whereby the longitudinal de-locking organ and the short side of the release mechanism can protrude from the door or retract into the door. 22 14. Locking mechanism within the meaning of claim 1, where the driving device is installed in a central area of ​​the door, with the central area defined by a length and a width respectively equal to 0.9 times a length of the non- equilateral rectangular reticle and 0.9 times a width of the non-equilateral rectangular reticle, and a center point of the central area aligned with a geometric center of the door.

15. Non-equilateral rectangular reticle container comprising the locking mechanism according to one of claims 1-14. 23 FIG.1A 1