Device for moving semiconductor wafers in washing and chemical processing plants

Abstract

FIELD: semiconductor engineering.SUBSTANCE: invention can be used for moving and positioning semiconductor, crystal wafers and process vessels in washing and chemical processing units. The device for moving semiconductor wafers in washing and chemical processing units comprises a hoist with a lifting mechanism, a trolley and a gripping device. The hoist consists of a housing 23 with rollers 3, which are screwed to rods 4, a transition spacer 2, a lifting mechanism consisting of an L-shaped rod 5 welded to the lower cover of the hoist, on which a roller unit 8 is mounted, a crank mechanism, two front covers 12, an electric motor 14, which provides movement along a horizontal plane, the shaft of which is connected to gear wheels 1 through a transition spacer 2, which are in engagement with horizontal toothed racks 11, which are simultaneously linear guides for the rollers 3 of the housing. The lifting mechanism consists of a flywheel 10, a crank 9, a connecting rod 6, a bearing 13 and a gripping device. The trolley consists of a frame 21 welded from a rectangular profile, on which toothed racks 11 are located, four industrial rollers 20 and at least one trolley electric motor placed in an electric motor box 19.EFFECT: increasing the number of degrees of freedom, improving the mobility of wafer movement and increasing the degree of mechanization and automation of various washing and chemical processing units in semiconductor production.7 cl, 15 dwg

Description

[0001] The invention relates to the field of semiconductor engineering and can be used for moving and positioning semiconductor, crystal wafers and process vessels in washing and chemical processing units.

[0002] From the invention patent RU 2679863 C1, a manipulator for moving semiconductor wafers is known, which is included with a bearing unit mounted on it with a side shaft and a shaft coaxially located in the housing, a drive consisting of a first motor, a first rotor, which is connected to the outer shaft, the first stator is connected to the drive shaft, and a second rotor, the second rotor, which is connected to the shaft, and the second stator is connected to the bracket, an arm consisting of a shoulder belt, including a shoulder housing and a shoulder output pulley connected to the shoulder input pulley by a shoulder closed belt, an elbow, an elbow housing, which through an output elbow shaft rigidly connected to it and a bearing connection with the elbow output pulley, which is connected by an elbow closed belt to the elbow input pulley, a rigid change through the elbow input pulley with a shoulder housing and an additional diameter half that of the elbow output pulley, and a bushing, wrist housing,which is rigidly connected to the elbow output pulley, the output flange which is rigidly connected to the elbow housing, the diameter of the shoulder input pulley is not greater than the diameter of the shoulder output pulley.,

[0003] The disadvantages of this device are that the plates move only along arcs, and the inability to install this manipulator in a process unit. This device can be installed and used between the storage devices and process units of the equipment complex in the center between them, but it requires the process units to be positioned in a certain way.

[0004] The closest analogue of the proposed invention is a device for moving semiconductor wafers, described in the patent for invention US 5468302 (class H01L 21 / 00, 13.07.1994), which includes a mechanism for horizontal movement of the load in the horizontal and vertical plane, as well as a gripping device.

[0005] A drawback of the closest analogue is its kinematic design, which has two degrees of freedom, requiring the baths to be positioned in a specific manner. The known device lacks plate positioning capabilities, can only be used in a specific installation, and has only one gripper.

[0006] The objective of the proposed invention is to create a device for moving semiconductor wafers that can be used in washing and chemical processing installations of various designs and technological processes.

[0007] The technical result of the proposed invention is to increase the number of degrees of freedom, increase the mobility of plate movement, and also increase the degree of mechanization and automation of various installations for chemical processes in semiconductor production.

[0008] The technical result is achieved in that the device for moving semiconductor wafers in washing and chemical processing units includes a mechanism for moving in a horizontal and vertical plane, a gripping device, according to the proposal, additionally contains a hoist consisting of a housing with rollers that are screwed to the rods, an adapter spacer, a lifting mechanism consisting of an L-shaped rod attached by welding to the lower cover of the hoist, on which a roller block is installed, including rollers, and a crank-connecting rod mechanism, including a flywheel attached to the shaft of an electric motor that performs lifting, a crank connected to the flywheel by means of a fork-type hinge joint, a connecting rod connected to the crank by means of a fork-type hinge joint and installed in the roller block;two front covers, an electric motor that moves along a horizontal plane, the shaft of which is connected to gear wheels through an adapter spacer, which are engaged with horizontal toothed racks, which are also linear guides for the housing rollers, a cart consisting of a frame made of a rectangular profile on which toothed racks are located, four industrial rollers and at least one cart electric motor placed in a box.

[0009] The toothed racks are attached to the trolley frame, made of a rectangular profile, by means of a threaded connection.

[0010] The trolley contains industrial rollers for movement, pressed onto adapter shafts, which, in turn, are pressed into bearings pressed into electric motor boxes.

[0011] The shafts of the cart's electric motors are screwed to the adapter shaft with threaded connections.

[0012] The gripping device is made in the form of a basket, attached to the connecting rod of the crank mechanism by means of a basket rod screwed to a metal spacer, which is magnetized to an electromagnet screwed to the adapter spacer of the electric motor shaft, located inside the box, screwed to a metal plate, which is screwed to the connecting rod.

[0013] The gripping device is made in the form of a U-shaped frame, to which two electromagnets are screwed, connected to two clamps via a magnetic connection.

[0014] A U-shaped frame is used as a gripping device, to which two clamps are screwed for holding the process vessel, while the U-shaped frame is attached to the connecting rod by means of a magnetic connection made in the form of an electromagnet screwed with a threaded connection to the connecting rod.

[0015] The essence of the invention is explained by the following figures. Fig. 1 shows a drawing of the moving device (isometric view).

[0016] Fig. 2 shows a drawing of a moving device with a cart (isometric view)

[0017] Fig. 3 shows a drawing of the moving device (front view).

[0018] Fig. 4 shows a drawing of the moving device (side view).

[0019] Fig. 5 shows a 3D model of the moving device.

[0020] Fig. 6 shows a 3D model of the cart.

[0021] Fig. 7 shows a drawing of a hoist on a cart (top view).

[0022] Fig. 8 shows a drawing of a hoist on a cart (side view).

[0023] Fig. 9 shows a drawing of a second embodiment of the gripping device.

[0024] Fig. 10 shows a drawing of a hoist with a first version of a gripping device (front view).

[0025] Fig. 11 shows a drawing of a hoist with a first version of a gripping device (side view)

[0026] Fig. 12 shows a drawing of the first version of the gripping device (isometric view).

[0027] Fig. 13 shows a drawing of the first embodiment of the gripping device (side view).

[0028] Fig. 14 shows a drawing of a hoist with a first version of a gripping device (isometric view).

[0029] Fig. 15 shows a drawing of a third embodiment of the gripping device.

[0030] In Fig. 1 - Fig. 15 the following positions are designated:

[0031] 1 - gear wheel, 2 - adapter spacer, 3 - roller, 4 - rod, 5 - roller block rod, 6 - connecting rod, 7 - roller, 8 - roller block housing, 9 - crank, 10 - flywheel, 11 - toothed rack, 12 - front cover, 13 - bearing, 14 - electric motor that moves the hoist, 15 - electric motor that lifts, 16 - U-shaped frame, 17 - clamp, 18 - electromagnet, 19 - electric motor box, 20 - industrial roller, 21 - trolley frame, 22 - technological glass (glass), 23 - hoist housing, 24 - basket, 25 - electromagnet, 26 - adapter spacer of the electric motor shaft, 27 - metal spacer, 28 - rod, 29 - metal plate, 30 - box, 31 - electromagnet, 32 - bearing, 33 - adapter shaft.

[0032] A device for moving semiconductor wafers in washing and chemical processing units (Fig. 1, Fig. 2) comprises a hoist with a lifting mechanism, a cart and a gripping device.

[0033] The hoist consists of a housing 23 with rollers 3, which are screwed to rods 4, a transition spacer 2, a lifting mechanism consisting of an L-shaped rod 5 attached by welding to the lower cover of the hoist, on which a block of rollers 8 is installed, a crank mechanism, two front covers 12, an electric motor 14, which carries out movement along a horizontal plane, the shaft of which is connected to gear wheels 1 through a transition spacer 2, which are in engagement with horizontal toothed racks 11, which are simultaneously linear guides for the rollers 3 of the housing.

[0034] The roller block 8 includes rollers 7. The crank mechanism includes a flywheel 10 attached to the shaft of an electric motor 15 that performs lifting, a crank 9 connected to the flywheel by means of a fork-type articulated joint, a connecting rod 6 connected to the crank by means of a fork-type articulated joint and installed in the roller block 8.

[0035] In this case, inside the housing 23 of the hoist, two electric motors 14 and 15 are placed, the shaft of the first of which is connected to gear wheels 1, which are in engagement with horizontal toothed racks 11. The sides of the horizontal toothed racks 11 are simultaneously linear guides for the rollers 3 of the housing.

[0036] The adapter spacer 2 is an intermediate link between the shaft of the electric motor 14, which carries out the movement, and the gear wheel 1. It serves to relieve the load on the shaft of the electric motor 14.

[0037] The hoist mechanism consists of a flywheel 10, a crank 9, a connecting rod 6, a bearing 13, and a gripping device. Bearing 13 is a standard component used in the hoist and in the hoist mechanism for movement. Electric motor 15 lifts the hoist. Limit rollers 3 are mounted on four rods 4. Each rod 4 has two rollers 3.

[0038] The cart consists of a frame 21 welded from a rectangular profile, on which toothed racks 11 are located, four industrial rollers 20, and at least one cart electric motor placed in an electric motor box 19. On average, from one to four electric motors (respectively, electric motor boxes 19) are provided.

[0039] The device for handling semiconductor wafers (or beakers) comprises a hoist body 23, which is located on two toothed racks 11. The use of toothed engagement is necessary to completely eliminate hoist slippage. To prevent the hoist from slipping off the racks and jamming during movement, rollers 3 are bolted to rods 4, which are a monolithic element bolted to the rigid sides of the hoist frame. The hoist itself rests on the racks via toothed wheels 1. The gears are threaded to adapter spacers 2, which are pressed into bearings 13, which are pressed into the hoist's front covers 12. The transition spacer is an intermediate link between the shaft of the electric motor 14, which carries out the movement, and the gear wheel.It serves to relieve the shaft of electric motor 14, which moves the hoist, by absorbing the axial mechanical loads acting on the gear axle due to the hoist's weight distribution. Front covers 12 are secured to the hoist's monolithic frame using threaded connections. Electric motors are also screwed to the front covers. The arrangement of this unit allows for the electric motors to be interchanged. If necessary, the number of motors can be increased from two (one driving the load-lifting mechanism and the second responsible for the hoist's linear movement) to six (four motors responsible for hoist movement and two responsible for lifting). This arrangement also allows the lifting mechanism to be relocated from one side to the other. The lower cover is secured to the hoist's monolithic frame using threaded connections and serves as a load-bearing element for the entire unit.Stiffening ribs are screwed to the cover using screw connections, to which the roller block rod 5 is electric-welded. This element serves as the fastening element for the roller block. The roller block prevents the crank mechanism from becoming distorted or jammed. The roller block consists of six industrial-grade rollers 7 with an inner diameter of 10 mm and an outer diameter of 30 mm. They are pressed onto studs. These studs are welded to the block's housing 8, which is made of a channel steel.

[0040] For lifting, the proposed semiconductor wafer handling device is also equipped with a crank-and-connecting rod lifting mechanism, which consists of a flywheel 10, a crank 9, a connecting rod 6, and two kinematic links. The flywheel is a single cast monolithic component bolted to the shaft using threaded connections. The shaft is pressed into a spacer adapter. The spacer adapter, in turn, is pressed into a bearing 13, which is pressed into the front cover 12 of the hoist. The spacer adapter is bolted to the shaft of the electric motor 15, which performs the lifting. This solution prevents the lifting mechanism from placing load on the motor shaft.

[0041] Crank 9 is bolted to flywheel 10 via a threaded connection, forming a pivot joint. In this design, crank 9 is a cylindrical part with fork-shaped heads bolted to its ends.

[0042] Next to the crank is the connecting rod 6. It is attached to the lower fork head of the crank by another fork head, which is threaded to the connecting rod. The hoist racks 11 can be threaded to the rectangular profile of the bogie. To add another degree of freedom, the racks can be mounted on a bogie, whose frame 21 is welded from a rectangular profile. The racks are threaded to the frame. The bogie rests on industrial rollers 20, which move along the corners of the washing and chemical treatment unit. Industrial rollers 20 are pressed onto adapter shafts 33, which in turn are pressed into bearings 32, which are pressed into electric motor boxes 19. The electric motors are bolted into the boxes with screws. The electric motor shafts are screwed to adapter shaft 33 with threaded connections. Electric motor boxes 19 are welded to the bogie frame 21.This design allows the use of 1 to 4 electric motors.

[0043] The hoist contains a removable gripping device, which can be designed in several versions. Depending on the type of chemical vessel and the required chemical treatment, the gripping devices can be interchanged.

[0044] Fig. 12 shows the first version of the gripping device, including a basket 24 made of polypropylene, which is located on a rod 28, which is screwed to a metal spacer 27, which is magnetized to an electromagnet 25, screwed to an adapter spacer 26 of the electric motor shaft (not shown in the drawing), which, in turn, is located inside a box 30, screwed to a metal plate 29, screwed to a connecting rod 6.

[0045] Fig. 10 shows a second embodiment of the gripping device. The gripping device is designed as a U-shaped frame 16, to which two electromagnets 18 are attached, connected to two clamps 17 via a magnetic connection.

[0046] Two clamps 17 are designed to hold process vessels 22. The clamps are screwed together using a threaded connection. Rubber gaskets are located inside the clamps to prevent the process vessels from falling out or being damaged.

[0047] Fig. 15 shows a third embodiment of the gripping device. The gripping device consists of a U-shaped frame 16, to which two clamps 17 are attached for holding the process vessel 22. Clamps 17 securely hold the process vessel (glasses) via a threaded connection. An electromagnet 31 is attached to connecting rod 6, which grips U-shaped frame 16, to which two clamps 17 are attached, holding the process vessel 22.

[0048] In this case, the U-shaped frame 16 is attached to the connecting rod by means of a magnetic connection made in the form of an electromagnet 31, screwed with a threaded connection to the connecting rod 6. To move the process vessel, the clamps 17 are rigidly screwed with threaded connections to the U-shaped frame 16, which is a bent strip profile.

[0049] The proposed device works as follows.

[0050] The washing and chemical treatment unit, which houses the handling device, contains angles rigidly attached to the top of the unit, used to move the trolley 21. Process vessels 22 are installed in the loading area of ​​the washing and chemical treatment unit, secured to a clamp 17 via a threaded connection. The clamp is made of magnetic metal.

[0051] The semiconductor wafer handling device is installed on the washing unit. Using racks 11 and trolley 21, the hoist approaches process vessels 22, which are installed in the loading area of ​​the washing and chemical treatment unit. Electromagnets 18 of the gripping device, located on the U-shaped frame 16, are activated and magnetized to special platforms on the half-rings of the clamp 17. Then, the process vessel 22 (for example, a glass) can be lifted using a crank-connecting rod mechanism: The torque is transmitted from the electric motor 15, which carries out the lifting, via an adapter spacer to the flywheel 10, which in turn sets in motion the crank 9 and connecting rod 6, which are attached sequentially to each other. The roller block 8 eliminates the distortion of the connecting rod and allows for strictly vertical movement of the process vessel and plates along the Z axis.Further movement of the hoist 23 along the X-axis is achieved by moving the hoist along the toothed racks 11; along the Y-axis, by moving the trolley 21 along the metal profile corners. The movement of the plates located in the polypropylene basket 24 with the rod 28 is achieved in a similar manner; however, one electromagnet 25 is used to grip the rod with the metal spacer 27, rather than two, as in the case of the device for gripping process vessels. For additional positioning and rotation of the substrates, this gripping device implements a fourth degree of freedom: the electromagnet 25 holding the basket 24 is rotated by an electric motor located in the box 30 after the substrates have been moved into the process vessel 22.

[0052] With the first capture device, the device works as follows.

[0053] A polypropylene basket 24 with manually installed plates is installed in the loading zone. A metal spacer 27 is screwed to the basket rod 28 for magnetic connection with an electromagnet 25, which is screwed to the adapter spacer of the electric motor shaft, which is located in the box 30, held by a metal spacer 29, which is screwed to the connecting rod 6. The moving device approaches the loading zone and the electromagnet 25 magnetizes the metal spacer 27. The moving device, using a crank mechanism, lifts the basket 24 along the Z axis and moves it to the desired working area of ​​the installation by means of a hoist 23 and a trolley 21, along the X and Y axes, respectively. Then the crank mechanism lowers the basket 24. The electric motor, the box 30 of which is located on the connecting rod 6, positions the basket 24 in the working area, after which the electromagnet 25 releases the basket 24. If necessary, the cycle is repeated alternately with several batches.Also, the electromagnet 25 may not release the basket 24 so that the electric motor located on the connecting rod 6 rotates the basket with the plates (if required by the technological installation process).

[0054] The second gripper operates as follows. A process vessel (glass) 22, secured in clamps 17, is placed in the loading zone. The transport device approaches the loading zone. Electromagnets 18, located on a U-shaped frame 16 bolted to a connecting rod 6, magnetize clamps 17, which hold the glass 22. The transport device, using a crank mechanism, lifts the glass along the Z axis and moves it to the desired working area of ​​the installation via a hoist 23 and a trolley 21, along the X and Y axes, respectively. The crank mechanism then lowers the glass 22. Electromagnets 18 release clamps 17 with the glass 22 secured in them. If necessary, the cycle is repeated alternately with several glasses.

[0055] The third gripper operates as follows. A process vessel (cup) 22, secured in clamps 17, is placed in the loading area. The clamps are firmly bolted to a U-shaped frame 16. The transfer device approaches the loading area. Electromagnet 31, bolted to connecting rod 6, magnetizes U-shaped frame 16, to which the cup is secured in clamps. The transfer device, using a crank mechanism, lifts U-shaped frame 16 with cup 22 along the Z-axis and moves it to the desired working area of ​​the unit via hoist 23 and trolley 21, along the X- and Y-axes, respectively. Then the crank mechanism lowers the U-shaped frame 16 with the cup, the electromagnet 31 releases the U-shaped frame with clamps screwed to it, in which the cup 22 is secured.

[0056] The proposed device lifts and moves crystal plates and process vessels between various process units of the washing plant, and also loads and unloads crystal plates and process vessels.

Claims

1. A device for moving semiconductor wafers in washing and chemical processing units, including a mechanism for moving in a horizontal and vertical plane, a gripping device, characterized in that it additionally contains a hoist consisting of a housing with rollers that are screwed to the rods, an adapter spacer, a lifting mechanism consisting of an L-shaped rod attached by welding to the lower cover of the hoist, on which a roller block is mounted, including rollers, and a crank-connecting rod mechanism, including a flywheel attached to the shaft of an electric motor that lifts the crank, connected to the flywheel by means of a fork-type hinge joint, a connecting rod connected to the crank by means of a fork-type hinge joint and installed in the roller block;two front covers, an electric motor that moves along a horizontal plane, the shaft of which is connected to gear wheels through an adapter spacer, which are engaged with horizontal toothed racks, which are also linear guides for the housing rollers, a cart consisting of a frame made of a rectangular profile on which toothed racks are located, four industrial rollers and at least one cart electric motor placed in a box.

2. The moving device according to paragraph 1, characterized in that the toothed racks are attached to the frame of the cart, made of a rectangular profile, by means of a threaded connection.

3. The moving device according to paragraph 1, characterized in that the cart contains industrial rollers for moving, pressed onto adapter shafts, which, in turn, are pressed into bearings pressed into electric motor boxes.

4. The moving device according to paragraph 1, characterized in that the shafts of the electric motors of the cart are screwed to the adapter shaft with threaded connections.

5. The moving device according to paragraph 1, characterized in that the gripping device is made in the form of a basket, which is attached to the connecting rod of the crank mechanism by means of a basket rod, which is screwed to a metal spacer, which is magnetized to an electromagnet, which is screwed to the adapter spacer of the electric motor shaft, located inside the box, screwed to a metal plate, which is screwed to the connecting rod.

6. The moving device according to paragraph 1, characterized in that the gripping device is made in the form of a U-shaped frame, to which two electromagnets are screwed, connected to two clamps by means of a magnetic connection.

7. The moving device according to paragraph 1, characterized in that a U-shaped frame is used as a gripping device, to which two clamps are screwed for holding the process vessel, and the U-shaped frame is attached to the connecting rod by means of a magnetic connection made in the form of an electromagnet, screwed with a threaded connection to the connecting rod.

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