heat dissipation device

Abstract

DEPCT6921 / 10 / 2568 This disclosure provides for heat dissipation devices related to the field of science associated with... The invention of a device for the process of converting light energy into electricity by cells, which was Designed to address the issue of prolonged retention of hot air inside the device housing. The heat dissipation system is designed to cool the internal storage area within the equipment enclosure. Heat distribution includes the air intake frame and ventilation elements; the air intake frame is arranged accordingly. Inside the frame is the air intake frame, including the frame chamber, air intake duct, and air guide duct. Both interconnected vents within the air intake frame face the component storage location. The ventilation element is installed into the housing frame; the ventilation component is mounted on the housing frame. The ventilation elements are configured to provide the power to expel airflow from the guide channels. In this exposure, the duration of hot air retention inside the packaging frame is shortened;

Description

heat sink Technical Field

[0001] The present invention relates to the technical field of photovoltaic cell process equipment, and in particular to a heat dissipation device. Background Art

[0002] As the scale of the photovoltaic power generation market continues to grow, the demand for the production capacity of plasma-enhanced chemical vapor deposition (PECVD) equipment for silicon wafer coating in photovoltaic cell production is also increasing. Currently, PECVD equipment has developed from five-tube equipment to six-tube equipment, and the number of process wafers per tube has increased from 400 to 704. However, the increase in the size of PECVD equipment and the increase in the number of process wafers have also brought some problems, such as: (1) the cooling speed of the graphite boat inside the chassis is slow, affecting production capacity; (2) the heat dissipation during the heat dissipation process is large, and the hot air stays inside the chassis for too long, causing the chassis components to burn, which in turn causes safety accidents such as boat collision and component damage.

[0003] Therefore, in order to improve production capacity and equipment reliability, how to achieve rapid cooling of the graphite boat in the chassis has become a technical problem that needs to be solved urgently.

[0004] Summary of the Invention

[0005] The object of the present invention is to provide a heat dissipation device to solve the technical problem that hot air stays inside a chassis for too long.

[0006] The heat dissipation device provided by the present invention is used for cooling a storage area in a chassis. The heat dissipation device comprises an air suction frame and an air exhaust element.

[0007] The air suction frame is arranged inside the chassis, and the air suction frame has a frame cavity and an air suction port and an air inlet both connected to the frame cavity, and the air suction port faces the storage position;

[0008] The air suction element is installed on the chassis, and is used to provide power for the air flow to be discharged from the air inlet.

[0009] Furthermore, the air suction frame includes a longitudinal beam and a cross beam installed on the longitudinal beam, the longitudinal beam and the cross beam are both hollow beam structures, and the inner cavity of the cross beam is connected to the inner cavity of the longitudinal beam, and the inner cavity of the cross beam and the inner cavity of the longitudinal beam together form the frame cavity; the air suction port is opened on the cross beam, and the air inlet is opened on the longitudinal beam.

[0010] Furthermore, there are multiple cross beams, and the multiple cross beams are arranged at intervals along the extension direction of the longitudinal beams. The multiple cross beams are respectively provided in a one-to-one correspondence with the multiple storage positions of the chassis.

[0011] Furthermore, an extension direction of the beam is substantially parallel to a length direction of the storage bit.

[0012] Furthermore, the crossbeam is provided with a plurality of the air suction ports, and the plurality of the air suction ports are arranged at intervals along the extension direction of the crossbeam.

[0013] Furthermore, the chassis is provided with an air outlet, and the air inlet is communicated with the air outlet, so that the airflow discharged from the air inlet is discharged from the air outlet to the outside of the chassis.

[0014] Furthermore, the chassis is provided with an air supply port; the heat dissipation device further comprises a refrigeration module, and the refrigeration module is used to cool the air outside the chassis and send the air into the chassis through the air supply port.

[0015] Furthermore, the air supply port is located above a movement path of the object to be cooled entering the chassis.

[0016] Furthermore, the refrigeration module includes a shell and a refrigeration element, the shell is fixedly connected to the chassis, the shell has a refrigeration cavity, the air outlet and the air supply outlet are both connected to the refrigeration cavity; the exhaust element is also used to provide power for the air flow to flow from the air outlet to the air supply outlet, the refrigeration element is arranged in the refrigeration cavity, and the refrigeration element is in the flow path from the air outlet to the air supply outlet.

[0017] Furthermore, the shell also has a uniform flow cavity, which is located between the air outlet and the refrigeration cavity. The uniform flow cavity is provided with a uniform flow element, and the uniform flow element is used to make the airflow entering the uniform flow cavity evenly distributed along a set direction, wherein the set direction is basically perpendicular to the flow path of the airflow from the air outlet to the air supply port.

[0018] Furthermore, the flow uniforming element includes a flow uniforming plate and a spoiler both of which are fixedly connected to the shell, wherein the flow uniforming plate is provided with a plurality of flow uniforming holes arranged at intervals along the set direction, the flow uniforming cavity and the refrigeration cavity are respectively arranged on both sides of the flow uniforming plate and are connected through a plurality of the flow uniforming holes; the spoiler is used to guide the airflow entering the flow uniforming cavity along the set direction.

[0019] Furthermore, an air inlet is provided on the side wall of the shell, the air inlet is connected to the air outlet, the flow uniforming cavity is located between the air inlet and the refrigeration cavity, and the instantaneous flow direction of the airflow through the air inlet is along the set direction; the spoiler is opposite to the air inlet, and the spoiler is spaced from the flow uniforming plate to form an air flow channel extending along the set direction between the side of the spoiler and the flow uniforming plate, and the spoiler is provided with a plurality of dispersed spoiler holes.

[0020] Furthermore, the air inlet is connected to the air outlet through a connecting pipe.

[0021] Furthermore, the shell also has an air supply cavity, which connects the refrigeration cavity and the air supply port, and the air exhaust element is located between the refrigeration cavity and the air supply cavity, and the inlet of the air exhaust element is opposite to the refrigeration cavity, and the outlet of the air exhaust element is opposite to the air supply cavity.

[0022] Furthermore, the air supply cavity is provided with a guide section, which is located between the air suction element and the air supply port, and the flow area of ​​the guide section gradually decreases from the air suction element toward the air supply port.

[0023] Furthermore, the air supply port is opened on the top wall of the chassis; the refrigeration module is arranged on the top wall of the chassis, and the uniform flow cavity, the refrigeration cavity and the air supply cavity are arranged in sequence along the horizontal direction.

[0024] Furthermore, an air supply grille is provided on the bottom wall of the air supply cavity, the air supply grille is opposite to the air supply port, and the air supply cavity is connected to the air supply port through the air supply grille.

[0025] Furthermore, the refrigeration element includes a fin-tube heat exchanger, the heat exchange body of the fin-tube heat exchanger is accommodated in the refrigeration cavity, and the liquid inlet and liquid outlet of the fin-tube heat exchanger are both arranged on the side wall of the shell.

[0026] Furthermore, the shell is detachably fixedly connected to the chassis.

[0027] The beneficial effects brought about by the heat dissipation device of the present invention are:

[0028] When the heat dissipation device is in use, the air intake of the air intake frame faces the storage location within the chassis. The object to be cooled is stored in the storage location, and the air inlet of the air intake frame is connected to the air intake via the frame cavity. When the air extraction element is activated, it provides power to discharge air from the inlet, increasing the air pressure at the inlet. At this time, a negative pressure area is formed in the frame cavity, allowing air heated by the object to be cooled in the storage location to be drawn into the frame cavity through the air intake, and then flow to the inlet, completing the heat dissipation.

[0029] This method of using the suction port of the suction frame to discharge the hot air from the storage position, because the suction port is directly facing the storage position of the object to be cooled, that is, the suction port is facing the heat concentration area inside the chassis. On the one hand, it makes the heat dissipation process more targeted, so that the heat generated by the object to be cooled can be promptly away from the object to be cooled, reducing the residence time of the hot air around the object to be cooled. On the other hand, the hot air is sucked into the skeleton cavity by the suction port and then directly discharged from the air inlet (such as: discharged to the outside of the chassis; or, a refrigeration module is set up in the chassis, and the refrigeration module is used to cool the hot air discharged through the air inlet, and the hot air is converted into cold air and then directly discharged into the chassis), avoiding the large-scale flow of hot air inside the chassis, thereby shortening the residence time of the hot air inside the chassis. At the same time, it also reduces the distribution area of ​​the hot air inside the chassis, effectively solving the problem of burning electrical components inside the chassis and ensuring equipment reliability.

[0030] In addition, this type of heat dissipation device eliminates the tedious steps of using plant pipeline construction for heat dissipation in the past, which not only saves costs, but also improves the poor heat dissipation caused by long plant exhaust pipelines and high pipeline resistance. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0032] FIG1 is a schematic diagram of the layout of a heat dissipation device provided in the related art for dissipating heat from a graphite boat;

[0033] FIG2 is a schematic diagram of the structure of a heat dissipation device provided by the related art using a water-cooled coil fan to dissipate heat for a graphite boat;

[0034] FIG3 is a schematic diagram showing the principle of a heat dissipation device provided in the related art for dissipating heat from a graphite boat;

[0035] FIG4 is a schematic diagram of the layout of the heat dissipation device provided by an embodiment of the present invention relative to the chassis, wherein the chassis is a schematic diagram of the external structure;

[0036] FIG5 is a second schematic diagram of the layout of the heat dissipation device provided in an embodiment of the present invention relative to the chassis, wherein the chassis is a schematic diagram of the internal structure;

[0037] FIG6 is an external structural diagram of a chassis for installing a heat dissipation device provided by an embodiment of the present invention;

[0038] FIG7 is a schematic diagram of the overall structure of a heat dissipation device provided in an embodiment of the present invention;

[0039] FIG8 is a schematic diagram showing the positions of the graphite boat and storage locations inside the chassis;

[0040] FIG9 is a schematic diagram of the layout of the heat dissipation device relative to the graphite boat and the storage location according to an embodiment of the present invention;

[0041] FIG10 is a schematic structural diagram of an air suction frame of a heat dissipation device provided by an embodiment of the present invention;

[0042] FIG11 is a schematic diagram of the internal structure of the refrigeration module of the heat dissipation device provided in an embodiment of the present invention.

[0043] Explanation of Reference Numerals: 1'-Water-Cooled Coil Fan; 2'-Factory Exhaust; 3'-Door Panel; 4'-Storage Space; 5'-Graphite Boat; 6'-Chassis; 010-Chassis; 020-Graphite Boat; 030-Heat Dissipation Device; 040-Storage Space; 011-Air Outlet; 012-Air Supply Port; 100-Air Intake Frame; 200-Air Exhaust Element; 300-Refrigeration Module; 400-Connecting Pipe; 110-Longitudinal Beam; 111-Air Inlet; 120-Crossbeam; 121-Air Intake Port; 310-Casing; 320-Refrigeration Element; 330-Flow Uniformity Element; 340-Deflector; 350-Baffle; 360-Partitioning Plate; 370-Air Supply Grille; 380-Air Inlet; 311 - refrigeration chamber; 312 - flow-uniform chamber; 313 - air supply chamber; 3131 - flow guide section; 331 - flow-uniform plate; 3311 - flow-uniform hole; 332 - spoiler plate; 3321 - spoiler hole; 333 - air flow channel. DETAILED DESCRIPTION

[0044] Figure 1 is a schematic diagram of the layout of a heat dissipation device provided by the related art for dissipating heat from a graphite boat 5'. Figure 2 is a schematic diagram of the structure of the heat dissipation device provided by the related art using a water-cooled coil fan 1' to dissipate heat from the graphite boat 5'. As shown in Figures 1 and 2, the heat dissipation device provided by the related art has a factory exhaust 2' installed on the top of the chassis 6'. Furthermore, a water-cooled coil fan 1' is installed directly below the graphite boat 5' in each storage position 4'.

[0045] Figure 3 is a schematic diagram illustrating the principle of a heat dissipation device used to dissipate heat from a graphite boat 5', as described in the related art. As shown in Figure 3, this heat dissipation device utilizes forced air convection. Specifically, a water-cooled coil fan 1' performs convection heat exchange in the local air field. Simultaneously, ambient air enters the chassis 6' through circular holes in the door panel 3', exchanges heat with the graphite boat 5', and is then exhausted through the factory exhaust 2' at the top of the chassis 6'. The arrows in Figure 3 indicate the air flow path.

[0046] When the above-mentioned heat dissipation device is in use, after the external ambient air enters from the door panel 3', most of the air will flow upward along the plate surface of the door panel 3' and be directly extracted by the factory exhaust 2' without passing through the area where the storage position 4' is located. As a result, the graphite boat 5' placed in the storage position 4' does not exchange heat sufficiently, and the cooling time is too long, affecting production capacity. Moreover, since the area where the storage position 4' is located cannot fully perform convective heat exchange, the high-temperature heat emitted by the graphite boat 5' will be dissipated to other areas inside the chassis 6', causing the inside of the chassis 6' to heat up. The high-temperature air flows over a large area and for a long time inside the chassis 6', causing the electrical components inside the chassis 6' to be affected by the high temperature for a long time, shortening their lifespan. At the same time, this method of using a water-cooled coil fan 1' to increase the air turbulence intensity in the area where the storage position 4' is located will not significantly enhance the heat exchange effect, and each additional water-cooled coil fan 1' will increase the risk of water leakage and increase equipment costs.

[0047] Furthermore, this method of using the negative pressure generated by the exhaust fan 2' sucking away hot air as the driving force for air flow within the chassis 6' results in long exhaust fan 2' pipes and high resistance, resulting in high construction and operating costs. Furthermore, when this heat dissipation device is in use, the air intake into the chassis 6' is ambient air, which can also cause dust contamination of the process wafers inside the chassis 6'.

[0048] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following detailed description of the specific embodiments of the present invention is given in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0049] Figure 4 is a schematic diagram of the layout of the heat dissipation device provided in this embodiment relative to chassis 010 (chassis 010 is a schematic diagram of the external structure), and Figure 5 is a schematic diagram of the layout of the heat dissipation device provided in this embodiment relative to chassis 010 (chassis 010 is a schematic diagram of the internal structure). As shown in Figures 4 and 5, this embodiment provides a heat dissipation device for cooling the storage area 040 within chassis 010. Storage area 040 may contain a graphite boat 020 for storing objects to be cooled. Figure 6 is a schematic diagram of the external structure of chassis 010 for mounting the heat dissipation device provided in this embodiment.

[0050] Figure 7 is a schematic diagram of the overall structure of the heat dissipation device 030 provided in this embodiment, and Figure 8 is a schematic diagram of the structure of the air suction frame 100 of the heat dissipation device 030 provided in this embodiment. As shown in Figures 7 and 8, the heat dissipation device 030 includes the air suction frame 100 and the air extraction element 200 (shown in Figure 11). Specifically, in conjunction with Figure 5, the air suction frame 100 is disposed inside the chassis 010. The air suction frame 100 has a frame cavity and an air suction port 121 and an air inlet 111, both of which are connected to the frame cavity. The frame cavity is the internal cavity formed in the air suction frame 100.

[0051] Figure 9 schematically illustrates the positions of the graphite boat 020 and storage location 040 within chassis 010. Figure 10 schematically illustrates the layout of the heat dissipation device 030 provided in this embodiment relative to the graphite boat 020 and storage location 040. Continuing with Figure 5 and in conjunction with Figures 9 and 10 , the air intake port 121 of the air intake frame 100 faces toward storage location 040. It will be readily understood that Figures 9 and 10 only depict the virtual position of the graphite boat 020 on storage location 040 and do not depict the physical structure shown in Figure 5 .

[0052] Figure 11 is a schematic diagram of the internal structure of the cooling module 300 of the heat dissipation device 030 provided in this embodiment. Continuing to refer to Figure 5 and in conjunction with Figure 11 , the air extraction element 200 is mounted on the chassis 010 and is used to provide power for the airflow to be discharged from the air inlet 111 .

[0053] When the heat dissipation device 030 is in use, the air suction port 121 of the air suction frame 100 faces the storage position 040 in the chassis 010. For example, as shown in FIG5 , there may be multiple air suction ports 121 corresponding to each storage position 040, for example, two, and the multiple air suction ports 121 are distributed near the bottom of the graphite boat 020 on the corresponding storage position 040. The graphite boat 020 is stored in the storage position 040, and the air inlet 111 of the air suction frame 100 is connected to the above-mentioned air suction port 121 through the frame cavity. When the air exhaust element 200 is started, it provides power for the air flow to be discharged from the air inlet 111, so that the air flow pressure at the air inlet 111 increases. At this time, the frame cavity forms a negative pressure area, so that the air heated by the graphite boat 020 at the storage position 040 can be sucked into the frame cavity through the air suction port 121, and then flow to the air inlet 111 to complete the heat dissipation.

[0054] This method of using the air suction port 121 of the air suction frame 100 to discharge the hot air from the storage position 040 is that the air suction port 121 is directly facing the storage position 040 of the graphite boat 020, that is, the air suction port 121 is facing the heat concentration area inside the chassis 010. On the one hand, it makes the heat dissipation process more targeted, so that the heat generated by the graphite boat 020 can be away from the graphite boat 020 in time, reducing the residence time of the hot air around the graphite boat 020. On the other hand, the hot air is directly discharged from the frame cavity after being sucked into the frame cavity by the air suction port 121. The hot air is discharged through the air vent 111 (e.g., discharged to the outside of the chassis 010; or, a refrigeration module is set up in the chassis 010, and the refrigeration module is used to cool the hot air discharged through the air vent 111, and the hot air is converted into cold air before being directly discharged into the chassis 010), thereby avoiding a large-scale flow of hot air inside the chassis 010, thereby shortening the residence time of the hot air inside the chassis 010, and at the same time, reducing the distribution area of ​​the hot air inside the chassis 010, effectively solving the problem of burning electrical components inside the chassis 010, and ensuring the reliability of the equipment.

[0055] In addition, the setting form of this heat dissipation device 030 eliminates the tedious steps of using factory pipeline construction for heat dissipation in the past, which not only saves costs, but also improves the poor heat dissipation caused by long factory exhaust pipelines and high pipeline resistance.

[0056] It should be noted that, in this embodiment, only the graphite boat 020 is used as an example to illustrate the object to be cooled. It is understandable that the object to be cooled can also be other items that need to be cooled. This embodiment only uses the heat at the storage position 040 generated by the graphite boat 020 as an example to illustrate the structure and principle of the heat dissipation device, and it cannot be regarded as a limitation of this application.

[0057] Please continue to refer to Figure 6. In this embodiment, the chassis 010 can have an air outlet 011. Specifically, the air inlet 111 of the air suction frame 100 is connected to the above-mentioned air outlet 011, so that the air discharged from the air inlet 111 is discharged from the air outlet 011 to the outside of the chassis 010.

[0058] By opening an air outlet 011 in the chassis 010, the hot air around the graphite boat 020 can be sucked away by the air suction port 121 of the air suction frame 100 and flow to the air inlet 111, and then discharged to the outside of the chassis 010 through the air outlet 011 of the chassis 010, preventing the hot air from staying inside the chassis 010 for a long time.

[0059] 6 , in this embodiment, the air outlet 011 is provided on the top wall of the chassis 010. This arrangement effectively utilizes the rising property of hot air, causing the hot air inside the chassis 010 to have a tendency to move toward the air outlet 011, which not only facilitates the discharge of the hot air but also reduces the air suction resistance of the air suction element 200.

[0060] Continuing with Figures 5, 7, and 8, in this embodiment, the air suction frame 100 includes a longitudinal beam 110 and a transverse beam 120 mounted on the longitudinal beam 110. Specifically, both the longitudinal beam 110 and the transverse beam 120 are hollow beam structures, and the inner cavity of the transverse beam 120 is connected to the inner cavity of the longitudinal beam 110, and the inner cavity of the transverse beam 120 and the inner cavity of the longitudinal beam 110 together form the frame cavity. The air suction port 121 is provided on the transverse beam 120, and the air inlet 111 is provided on the longitudinal beam 110.

[0061] When heat dissipation device 030 is in operation, the heat dissipated by graphite boat 020 placed in storage position 040, under the action of air extraction element 200, will first enter the frame cavity through air intake vents 121 provided on crossbeam 120, and then be discharged through air inlet vents 111 provided on longitudinal beam 110, achieving the purpose of heat dissipation. This method of heat dissipation using air suction frame 100 not only effectively prevents the large-scale flow of heat within chassis 010, solving the problem of burning electrical components within chassis 010 and improving the heat dissipation efficiency of graphite boat 020, but also reduces the internal space occupied by chassis 010, improving space utilization.

[0062] In other embodiments, an air suction box may be used instead of the air suction frame 100 to suck air. In this case, the internal space of the air suction box forms a frame cavity. At the same time, holes are opened on the box wall of the air suction box that are connected to its internal space to form an air suction port 121 and an air inlet 111. This setting can also prevent hot air from flowing over a large area inside the chassis 010.

[0063] In this embodiment, the longitudinal beams 110 and the transverse beams 120 of the air suction frame 100 may both be made of stainless steel, and the air suction frame 100 may be obtained by welding and fixing the longitudinal beams 110 and the transverse beams 120 .

[0064] 5 , 7 and 8 , in this embodiment, there are multiple crossbeams 120 , which are arranged at intervals along the extension direction of the longitudinal beams 110 , and are respectively provided in one-to-one correspondence with the multiple storage locations 040 of the chassis 010 .

[0065] The above arrangement, on the one hand, enables each storage position 040 to be provided with a corresponding crossbeam 120 with an air intake 121, so that the air intake 121 provided on each crossbeam 120 can absorb the hot air at the corresponding storage position 040 in a targeted manner, reducing the flow of hot air between any two adjacent storage positions 040 and enhancing the heat exchange effect in the storage position 040 area. On the other hand, the arrangement of multiple crossbeams 120 also increases the number of air intakes 121 and expands the distribution area of ​​the air intakes 121 along the length direction of the longitudinal beam 110, so that the hot air inside the chassis 010 can be dissipated outward in a timely and sufficient manner, further improving the heat dissipation efficiency.

[0066] Continuing with FIG5 , in this embodiment, the extension direction of the crossbeam 120 is substantially parallel to the length direction of the storage location 040. The length direction of the storage location 040 is the length direction of the graphite boat 020. In other words, the extension direction of the crossbeam 120 is substantially parallel to the length direction of the graphite boat 020, i.e., the left-right direction from the perspective of FIG5 .

[0067] This arrangement not only increases the effective area of ​​the air suction port 121, but also minimizes the distance between the crossbeam 120 and the storage position 040, thereby enabling the heat generated at various locations along the length of the graphite boat 020 to be absorbed as quickly as possible, further improving the heat dissipation efficiency.

[0068] In this embodiment, the cross-sectional shape of the chassis 010 is rectangular, the air suction frame 100 is fixedly arranged inside the chassis 010, and the extension direction of the above-mentioned beam 120 is basically parallel to the length direction of the graphite boat 020. In other words, the air suction frame 100 is located between the storage position 040 and the box wall corresponding to one long side of the rectangle.

[0069] It should be noted that “the extension direction of the beam 120 is basically parallel to the length direction of the storage position 040” includes both the situation where the extension direction of the beam 120 is parallel to the length direction of the storage position 040 and the situation where the extension direction of the beam 120 is at a certain angle to the length direction of the storage position 040, wherein the above-mentioned angle can be between -5° and 5°.

[0070] In this embodiment, the air suction frame 100 can be fixed to the box wall of the chassis 010 by bolt connection.

[0071] 5 , 7 and 8 , in this embodiment, the crossbeam 120 defines a plurality of air suction ports 121 , which are spaced apart along the extending direction of the crossbeam 120 .

[0072] This arrangement of multiple suction ports 121 along the extension of crossbeam 120 increases the number of suction ports 121 and their distribution area, allowing hot air from storage location 040 to be quickly drawn away. Furthermore, utilizing multiple, spaced suction ports 121 to increase the suction area ensures the structural strength of crossbeam 120 and reduces deformation of crossbeam 120.

[0073] 4 to 6 , in this embodiment, the chassis 010 is further provided with an air supply port 012 ; the heat dissipation device 030 may further include a cooling module 300 , wherein the cooling module 300 is used to cool the air outside the chassis 010 and send the air into the interior of the chassis 010 through the air supply port 012 .

[0074] While the suction frame 100 is used to absorb the hot air inside the chassis 010, the refrigeration module 300 works to cool the air outside the chassis 010, and sends the refrigerated air into the interior of the chassis 010 through the air supply port 012, using convection heat exchange to cool the graphite boat 020, thereby achieving cooling treatment of the graphite boat 020.

[0075] That is to say, while the heat dissipation device 030 uses the air suction frame 100 to continuously output the hot air inside the chassis 010, it also uses the refrigeration module 300 to input cold air into the interior of the chassis 010, so that the heat dissipation efficiency of the graphite boat 020 is greatly improved, the graphite boat 020 is quickly cooled, and the cooling time of the graphite boat 020 is effectively shortened, thereby improving the equipment production capacity.

[0076] In other embodiments, the refrigeration module 300 can also be set inside the chassis 010. In this case, the hot air discharged through the air inlet of the suction frame 100 directly enters the refrigeration module 300 inside the chassis 010, is cooled by the refrigeration module 300, and after the hot air is converted into cold air, it is directly sent into the chassis 010 to participate in the cooling process of the graphite boat 020.

[0077] This arrangement of locating the refrigeration module 300 inside the chassis 010 also achieves the goal of delivering cool air into the chassis 010 while also shortening the airflow path. Furthermore, this arrangement ensures that the air used to cool the graphite boat 020 still originates from within the chassis 010. The entire heat dissipation and cooling process does not involve convection with the outside air, thus preventing contamination of the process wafers caused by large amounts of outside air entering the chassis 010.

[0078] In this embodiment, air outlet 012 is located above the path of movement of graphite boat 020 entering chassis 010. In other words, air outlet 012 is located above the furnace exit area of ​​graphite boat 020. This placement of air outlet 012 allows the graphite boat 020 to exchange heat with the refrigerated air introduced through air outlet 012 during the unloading operation. This arrangement effectively solves the problem of overheating of the top air during unloading.

[0079] 6 , specifically in this embodiment, the air outlet 012 is opened on the top wall of the chassis 010 .

[0080] Please continue to refer to Figure 11. In this embodiment, the refrigeration module 300 includes a shell 310 and a refrigeration element 320. The shell 310 is fixedly connected to the chassis 010. The shell 310 has a refrigeration cavity 311. The air outlet 011 and the air supply port 012 are both connected to the refrigeration cavity 311; the exhaust element 200 is also used to provide power for the air flow to flow from the air outlet 011 to the air supply port 012. The refrigeration element 320 is arranged in the refrigeration cavity 311, and the refrigeration element 320 is in the flow path from the air outlet 011 to the air supply port 012.

[0081] When the heat dissipation device 030 is in operation, the air heated by the graphite boat 020 inside the chassis 010 is drawn into the air intake frame 100 by the air intake element 200. The air then flows through the air intake port 111 of the air intake frame 100 to the air outlet 011. The hot air then continues to flow through the air outlet 011 into the refrigeration chamber 311 under the action of the air intake element 200, where it is cooled by the refrigeration element 320 disposed therein. The cooled air then enters the chassis 010 through the air supply port 012, participating in convective heat exchange with the graphite boat 020. This cycle achieves the purpose of cooling the graphite boat 020.

[0082] This setting of the refrigeration module 300 utilizes the same exhaust element 200 to achieve the output of hot air from the chassis 010 and the input of cold air from the outside of the chassis 010, thereby realizing the circulation of air inside and outside the chassis 010, so that the air used to cool the graphite boat 020 still comes from the inside of the chassis 010, that is, the self-circulation of air inside the chassis 010 is utilized to achieve the output of hot air and the input of cold air, and the entire heat dissipation and cooling process does not convect with the outside air, thereby avoiding the situation where the process sheet is contaminated due to a large amount of outside air entering the inside of the chassis 010.

[0083] In other embodiments, a non-air circulation solution may also be used. In this solution, the input of hot air and the output of cold air are two independent processes. At this time, a filter element may be provided at the air outlet 012 so that the refrigerated ambient air is first filtered by the filter element before entering the interior of the chassis 010. This setting can also prevent the process sheets inside the chassis 010 from being contaminated.

[0084] 11 , in this embodiment, a uniform flow cavity 312 may be further provided in the shell 310. Specifically, the uniform flow cavity 312 is located between the air outlet 011 and the refrigeration cavity 311, that is, the uniform flow cavity 312 is connected to the air outlet 011 and the refrigeration cavity 311, and the hot air output from the air outlet 011 enters the refrigeration cavity 311 through the uniform flow cavity 312. The uniform flow cavity 312 is provided with a uniform flow element 330, and the uniform flow element 330 is used to make the airflow entering the uniform flow cavity 312 evenly distributed along a set direction, wherein the set direction is substantially perpendicular to the flow path of the airflow from the air outlet 011 to the air supply port 012.

[0085] In this embodiment, the flow path of the airflow from the air outlet 011 to the air supply port 012 is substantially along the direction from arrow a to arrow b in FIG. 11 , and the set direction is substantially along the direction indicated by arrow cd in FIG. 11 .

[0086] The setting of the above-mentioned uniform flow cavity 312 ensures that the hot air inside the chassis 010 will first enter the uniform flow cavity 312 after flowing to the shell 310 through the air outlet 011, and will be uniformly flowed by the uniform flow element 330 set in the uniform flow cavity 312, so that the airflow entering the uniform flow cavity 312 can be evenly distributed along the set direction, so that the airflow can enter the refrigeration cavity 311 more evenly, avoiding the poor cooling effect caused by uneven distribution of the airflow in the refrigeration cavity 311, ensuring sufficient cooling of the airflow, and thus ensuring the subsequent cooling effect of the graphite boat 020.

[0087] It should be noted that "the setting direction is basically perpendicular to the flow path of the airflow from the air outlet 011 to the air supply outlet 012" includes both the situation where the setting direction is perpendicular to the flow path of the airflow from the air outlet 011 to the air supply outlet 012, and the situation where the setting direction and the flow path of the airflow from the air outlet 011 to the air supply outlet 012 form a certain angle, wherein the above-mentioned angle can be between 85° and 90°.

[0088] Continuing with reference to FIG11 , in this embodiment, the flow-leveling element 330 may include a flow-leveling plate 331 and a spoiler 332, both of which are fixedly connected to the housing 310, wherein the flow-leveling plate 331 has a plurality of flow-leveling holes 3311 spaced apart along a set direction, the flow-leveling cavity 312 and the refrigeration cavity 311 are disposed on either side of the flow-leveling plate 331 and are connected through the plurality of flow-leveling holes 3311; the spoiler 332 is used to guide the airflow entering the flow-leveling cavity 312 along a set direction. Specifically, the surface of the flow-leveling plate 331 is, for example, parallel to the set direction (roughly along the direction indicated by arrows cd in FIG11 ), and the flow-leveling cavity 312 and the refrigeration cavity 311 are disposed on either side in a direction perpendicular to the surface of the flow-leveling plate 331 (from arrow a to arrow b).

[0089] When the air flow enters the uniform flow cavity 312 from the air outlet 011, it will first pass through the spoiler 332, and use the spoiler effect of the spoiler 332 to guide the air flow along the set direction, so that the air flow can be evenly distributed along the set direction; after completing the guidance operation of the air flow along the set direction, at this time, the air flow gradually moves to the position of the uniform flow plate 331, and is distributed in various areas of the uniform flow plate 331 along the set direction, so that it can enter the refrigeration cavity 311 through the uniform flow hole 3311 opened on the uniform flow plate 331.

[0090] This setting of the flow-uniform element 330 not only realizes the effective separation of the internal space of the shell 310, so that the internal space of the shell 310 forms a flow-uniform cavity 312 and a refrigeration cavity 311 arranged in sequence, but also ensures the uniform distribution of the airflow, thereby enhancing the cooling effect of the refrigeration element 320 on the above-mentioned airflow.

[0091] In this embodiment, the flow equalizer 331 and the spoiler 332 can be fixed in the internal space of the housing 310 by welding.

[0092] Please continue to refer to Figure 11. In this embodiment, an air inlet 380 is opened on the side wall of the shell 310, and the air inlet 380 is connected to the air outlet 011. The uniform flow cavity 312 is located between the air inlet 380 and the refrigeration cavity 311, and the instantaneous flow direction of the airflow through the air inlet 380 is along the set direction; the spoiler 332 is opposite to the air inlet 380, and the spoiler 332 is spaced from the uniform flow plate 331 to form an air flow channel 333 extending along the set direction between the side of the spoiler 332 and the uniform flow plate 331, and the spoiler 332 has a plurality of dispersed spoiler holes 3321.

[0093] When the hot air inside the chassis 010 flows out through the air outlet 011, it will enter the uniform flow cavity 312 through the air inlet 380. After entering the uniform flow cavity 312, it will slow down due to the blocking effect of the uniform flow plate 331. Part of the air flow will flow to the air flow channel 333, and the other part of the air flow will continue to flow forward through the spoiler hole 3321 of the spoiler 332, so as to achieve the purpose of evenly distributing the air flow entering the uniform flow cavity 312 along the set direction.

[0094] In this embodiment, there are multiple spoilers 332 , and the multiple spoilers 332 are arranged at intervals along a set direction.

[0095] It should be noted that the “instantaneous flow direction of the airflow through the air inlet 380 ” is the axial direction of the air inlet 380 .

[0096] Continuing with Figures 7 and 10 , in this embodiment, the air inlet 380 is connected to the air outlet 011 via a connecting tube 400. The provision of the connecting tube 400 not only facilitates a transition from the air inlet 380 to the air outlet 011, thereby achieving communication between the air inlet 380 and the air outlet 011, but also eliminates the need for special design and manufacturing of the housing 310 and the air suction frame 100, thereby reducing costs.

[0097] Please continue to refer to Figure 11. In this embodiment, an air supply cavity 313 can also be set in the shell 310. Specifically, the air supply cavity 313 connects the refrigeration cavity 311 and the air supply port 012. The air exhaust element 200 is located between the refrigeration cavity 311 and the air supply cavity 313, and the inlet of the air exhaust element 200 is opposite to the refrigeration cavity 311, and the outlet of the air exhaust element 200 is opposite to the air supply cavity 313.

[0098] When the exhaust element 200 is working, a negative pressure will be formed at its inlet opposite to the refrigeration cavity 311, so that the hot air inside the chassis 010 can flow to the refrigeration cavity 311 through the suction frame 100, the air inlet 380, and the uniform flow cavity 312 in sequence, and be cooled by the refrigeration element 320; after that, the cooled air will enter from the inlet and flow out from the outlet of the exhaust element 200, so as to send this part of the cooled air into the air supply cavity 313, and finally enter the interior of the chassis 010 through the air supply port 012 to participate in the heat exchange of the graphite boat 020.

[0099] This setting form of the exhaust element 200 not only provides the circulation flow power of the air along the inside of the chassis 010 - air suction frame 100 - air outlet 011 - uniform flow cavity 312 - refrigeration cavity 311 - air supply cavity 313 - air supply outlet 012 - inside of the chassis 010, but also takes up less space, effectively saving space inside the shell 310.

[0100] In this embodiment, the air suction element 200 may be a booster fan; the air suction element 200 may be installed in the inner space of the housing 310 by means of bolts.

[0101] 11 , in this embodiment, a partition plate 360 ​​may be fixedly disposed inside the housing 310, and the air suction element 200 may be mounted on the partition plate 360. Furthermore, there are two air suction elements 200, which are spaced apart along a set direction.

[0102] In other embodiments, the ventilation elements 200 may be provided in other quantities, and the number of ventilation elements 200 may be adaptively selected according to the size of the housing 310 and the airflow power that needs to be provided.

[0103] Please continue to refer to Figure 11. In this embodiment, a guide section 3131 can be set in the air supply cavity 313. Specifically, the guide section 3131 is located between the exhaust element 200 and the air supply port 012, that is, it is connected to the exhaust element 200 and the air supply port 012. The airflow output by the exhaust element 200 first passes through the guide section 3131, and then passes through the air supply cavity 313 to enter the air supply port 012. In the direction from the exhaust element 200 to the air supply port 012, the flow area of ​​the guide section 3131 gradually decreases.

[0104] The provision of the guide section 3131 not only guides the airflow so that it can accurately flow to the air outlet 012 and reduce the diffusion of the airflow to areas outside the air outlet 012, but also can utilize the gradual reduction of the flow area to pressurize the airflow so that it can flow to the storage position 040 of the graphite boat 020 as quickly as possible to participate in heat exchange.

[0105] Continuing with Figure 11 , in this embodiment, the air supply cavity 313 is fixedly provided with two guide plates 340 arranged in an "octagonal" shape. The area between the two guide plates 340 forms the aforementioned guide section 3131. Furthermore, the two guide plates 340 are further connected to baffles 350, forming an air supply cavity 313 within the housing 310 that is surrounded by the partition plate 360, the two guide plates 340, the two baffles 350, and a portion of the sidewalls of the housing 310.

[0106] 4 and 5 , in this embodiment, the refrigeration module 300 is disposed on the top wall of the chassis 010 , and the flow uniforming cavity 312 , the refrigeration cavity 311 and the air supply cavity 313 are arranged in sequence along the horizontal direction.

[0107] This arrangement of setting the refrigeration module 300 on the top wall of the chassis 010 will not occupy the lateral space of the chassis 010, which is beneficial to reducing the floor space of the chassis 010. Moreover, by arranging the uniform flow cavity 312, the refrigeration cavity 311 and the air supply cavity 313 in sequence in the horizontal direction, it will not occupy too much top space of the chassis 010, which is beneficial to reducing the overall height of the equipment.

[0108] Continuing with FIG11 , in this embodiment, an air supply grille 370 may be provided on the bottom wall of the air supply cavity 313. Specifically, the air supply grille 370 is opposite to the air supply port 012, and the air supply cavity 313 is connected to the air supply port 012 via the air supply grille 370. The provision of the air supply grille 370 ensures the connection between the air supply cavity 313 and the air supply port 012 without significantly reducing the structural strength of the housing 310.

[0109] Continuing with Figure 11 , in this embodiment, the cooling element 320 may comprise a fin-tube heat exchanger. Specifically, the heat exchange body of the fin-tube heat exchanger is housed in the cooling cavity 311, and the liquid inlet and outlet of the fin-tube heat exchanger are both disposed on the sidewall of the housing 310. This configuration of the cooling element 320 not only ensures a cooling effect on the airflow, but also has a simple structure and is easy to arrange.

[0110] The liquid flowing in the fin-tube heat exchanger can be water or other coolants.

[0111] In this embodiment, the fin-tube heat exchanger can be fixed to the refrigeration cavity 311 by bolts.

[0112] In other embodiments, an air conditioning system may be provided in the refrigeration cavity 311 to cool the hot air entering the refrigeration cavity 311 . This arrangement can also achieve the cooling operation of the hot air in the airflow circulation mode.

[0113] In this embodiment, the housing 310 is detachably fixedly connected to the chassis 010. After the heat dissipation device 030 has been used for a period of time, the refrigeration module 300 can be removed from the top of the chassis 010 for maintenance to improve maintenance efficiency.

[0114] Specifically, the housing 310 can be fixed to the top wall of the chassis 010 by bolts.

[0115] The overall heat dissipation process of the heat dissipation device 030 is as follows: the air heated by the graphite boat 020 inside the chassis 010 is sucked away by the air suction port 121 provided on the crossbeam 120 of the air suction frame 100 and enters the air suction frame 100. The air flows through the skeleton cavity and continues to flow toward the air inlet 111 of the longitudinal beam 110 to the air outlet 011 of the chassis 010; then, it flows through the connecting pipe 400 to the refrigeration module 300, and enters the uniform flow cavity 312 from the air inlet 380 of the refrigeration module 300. It is first decelerated by the spoiler 332, and then uniformly circulated by the uniform flow plate 331 before entering the refrigeration cavity 311, where it exchanges heat with the fin-tube heat exchanger provided in the refrigeration cavity 311. During this process, the hot air flows through the fin gaps and passes through the fin-tube heat exchanger, exchanging heat with the cooling liquid in the fin-tube heat exchanger, cooling the hot air and lowering its temperature; then, the hot air that has completed the heat exchange flows to the air supply cavity 313, and finally enters the interior of the chassis 010 through the air supply grille 370 and the air supply port 012, participating in the cooling of the graphite boat 020. In the above process, the circulation power of the air flow is provided by the exhaust element 200.

[0116] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the scope defined by the claims.

[0117] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, article, or device that includes the element.

[0118] In the above embodiments, the descriptions of directions such as “inside”, “outside”, “upper”, “lower”, and “side” are all based on the drawings.

[0119] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is to be construed in the widest possible manner consistent with the principles and novel features disclosed herein.

Claims

DEPCT6921 / 10 / 25681. A heat dissipation device configured to dissipate heat from the storage area inside a housing enclosed by an air intake frame and ventilation elements, where the air intake frame is arranged inside the housing, the air intake frame includes the frame chamber and the air intake vents and air ducts connected to the frame chamber and the air intake vents facing the storage location, and the ventilation elements are installed in the housing and configured to provide power for releasing airflow from the air ducts.

2. A heat dissipation device according to claim 1 where the air intake frame includes longitudinal and transverse beams installed on the longitudinal beams, where the longitudinal and transverse beams have a hollow beam structure, the inner chamber of the transverse beam is connected to the inner chamber of the longitudinal beam, and the inner chamber of the transverse beam and the inner chamber of the longitudinal beam together form the housing chamber, and the air intake vents are constructed in the transverse beams and the air ducts are constructed in the longitudinal beams.3.

4. Heat distribution device under claim 2 where more than one transverse beam is provided, spaced along the extension direction of the longitudinal beam and having one-to-one correspondence with more than one storage position of the enclosure.

5. Heat distribution device under claim 2 where the extension direction of the transverse beam is substantially parallel to the longitudinal direction of the storage position.

6. Heat distribution device under claim 2 where more than one air intake vent is provided on the transverse beam and spaced along the extension direction of the transverse beam.

7. Heat distribution device under any of claims 1-5 where the enclosure includes an air outlet and an air intake vent connected to the air outlet so that the airflow released from the air intake vent is vented to the outside of the enclosure from the air outlet.

8. Heat dissipation device under claim 7 where the enclosure includes additional air outlets; the heat dissipation device includes additional heat sink assembly where the heat sink assembly is configured to cool the air outside the enclosure and send the air into the enclosure through the air outlets.

9. Heat dissipation device under claim 7 where the air outlets are located above the path of movement of the object to be cooled entering the enclosure.

10. Heat dissipation device under claim 7 where the heat sink assembly includes the enclosure and cooling elements where the enclosure is fixed to the enclosure; the enclosure includes the cooling chamber and air intake and exhaust ports and air outlet ports connected to the cooling chamber and cooling elements are configured to provide power for the airflow from the air intake to the air outlet and cooling elements are arranged in the cooling chamber and located in the path of airflow from the air intake to the air outlet.The heat distribution device under claim 9 whereby the enclosure includes an additional soothsay chamber where the soothsay chamber is arranged between the air intake and the cooling chamber, and the soothsay chamber includes soothsay elements where the soothsay elements are arranged so that the airflow entering the soothsay chamber is distributed uniformly in a predetermined direction, which is substantially perpendicular to the airflow path from the air intake to the air outlet.11.Heat distribution device according to claim 10 where the elements for uniform flow include a uniform flow panel and a turbulent flow panel fixed to the enclosure, where the uniform flow panel includes more than one of uniform flow holes arranged at intervals in a predetermined direction, the uniform flow chamber and cooling chamber are arranged on two sides of the uniform flow panel respectively and in contact with each other through more than one of uniform flow holes, and the turbulent flow panel is configured to direct the airflow entering the uniform flow chamber in a predetermined direction.12.Heat dissipation device according to claim 11 where the side walls of the enclosure include the air inlet, the air inlet is in contact with the air outlet, a solitary flow chamber is arranged between the air inlet and the cooling chamber and the direction of the airflow through the air inlet is predetermined and the turbulent flow panel is facing the air inlet, the turbulent flow panel and the solitary flow panel are spaced apart to create an airflow channel between the side edges of the turbulent flow panel and the solitary flow panel in a predetermined direction and the turbulent flow panel includes more than one turbulent flow hole arranged in a distributed manner.

13. Heat dissipation device according to claim 12 where the air inlet is in contact with the air outlet through a connecting duct.14.

15. Heat distribution device according to claim 14 where the enclosure includes an additional air supply chamber, the air supply chamber is connected to the cooling chamber by an air supply vent, the ventilation element is arranged between the cooling chamber and the air supply chamber, the inlet of the ventilation element faces the cooling chamber and the outlet of the ventilation element faces the air supply chamber.

16. Heat distribution device according to claim 14 where the air supply chamber includes a flow guide segment, the flow guide segment is arranged between the ventilation element and the air supply vent and the flow area of ​​the air guide segment gradually decreases in the direction from the ventilation element to the air supply vent.

17. Heat distribution device according to claim 14 where the air supply vent is constructed on the upper wall of the enclosure and the cooling assembly is arranged on the upper wall of the enclosure and chamber for uniform flow, the cooling chamber and the air supply chamber are arranged respectively in the horizontal direction.

18. Heat distribution device according to claim 9 where the cooling element including the finned tube heat exchanger, the main heat-exchanging portion of the finned tube heat exchanger is placed in the cooling chamber and the liquid inlet and liquid outlet of both the finned tube heat exchangers are placed on the side walls of the enclosure.

19. Heat distribution device according to claim 9 where the enclosure is connected to a removable and fixed packing frame.

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