Strontium compound, method of manufacturing thin film containing strontium and semiconductor device using the same

TW202626677APending Publication Date: 2026-07-01SAMSUNG ELECTRONICS CO LTD

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Patent Information

Application Number: TW114148012
Authority / Receiving Office: TW · TW
Patent Type: Applications
Current Assignee / Owner
Priority Date: 2024-12-09
Filing Date: 2025-12-08
Publication Date: 2026-07-01

Application Information

Patent Timeline

09 Dec 2024

Priority

08 Dec 2025

Application

TW114148012

01 Jul 2026

Publication

TW202626677A

IPC: C07F3/00; C23C16/40; C23C16/455; H10P14/692; H10W20/48

Inventors: 崔鐘元; 克拉夫丘克 D

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Abstract

A strontium compound, a method of making a thin film with the strontium compound, and a method of manufacturing a semiconductor device including the thin film. The strontium compound is represented by Chemical Formula 1: In Chemical Formula 1, n, L1, L2, A, and m are as defined herein.

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