Film-forming device

TW202629307APending Publication Date: 2026-07-16NIKON CORP
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Patent Information

Application Number
TW115109863
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2020-07-27
Filing Date
2021-07-27
Publication Date
2026-07-16
Patent Text Reader

Abstract

A film-forming device for supplying a mist to a surface of an object to form, on the surface of the object, a film of a substance contained in the mist. The film-forming device includes a mist generator for generating the mist, a feed port for feeding the mist generated in the mist generator to a space, and a supply port for supplying the mist in the space to the surface of the object. The supply port is provided at a position at which a first direction and a second direction intersects. The supply port and the feed port are arranged at different positions in the first direction within a first predetermined plane which the mist passes through.
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