Adhesive sheet for fixing polishing pad, polishing pad with adhesive layer a, and method for fixing polishing pad to a platen

Abstract

This invention provides an adhesive sheet for fixing an abrasive pad to a pressure plate, which offers advantages such as easy repositioning, excellent air expulsion, and superior adhesive properties; an abrasive pad with an adhesive layer (A); and a method for fixing the abrasive pad to the pressure plate. The adhesive sheet for fixing the abrasive pad has an adhesive layer (A) on one side of a sheet-like substrate and an adhesive layer (B) on the other side. The surface of the adhesive layer (A), which is not facing the sheet-like substrate, has uneven surfaces. The smoothness of the surface changes from -50.7 kPa to -48.0 kPa in 1 second to 100 seconds in a Beck smoothness test, and changes from -50.7 kPa to -29.3 kPa in 15 seconds to 1125 seconds.

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