Vacuum pump with an abatement function and control method thereof

Abstract

A vacuum pump, which is able to reduce the period where a vacuum pump with an abatement function cannot operate, is provided. The vacuum pump with an abatement function, including: a dry pump configured to evacuate exhaust gas from a tool; and an abatement unit configured to abate the exhaust gas evacuated by the dry pump. The dry pump includes: a base; a booster pump disposed on the base and connected to the tool; a first main pump disposed on a side of the base and connected to the booster pump; and a second main pump disposed on a side of the base and connected to the booster pump.

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