Simultaneous confocal and non-confocal raman spectroscopy

TW202629976APending Publication Date: 2026-07-16ONTO INNOVATION INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ONTO INNOVATION INC
Filing Date
2025-09-22
Publication Date
2026-07-16

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Abstract

An optical metrology device simultaneously performs confocal and non-confocal Raman spectroscopy. The optical metrology device includes a double-clad fiber with a core that acts as a confocal pinhole to receive the confocal signal from the Raman response while simultaneously receiving the non-confocal signal from the Raman response over the inner cladding and core of the double-clad fiber. A spectrometer receives the Raman response via the double-clad fiber to detect the confocal spectroscopic signal from the core and to detect the non-confocal spectroscopic signal from the inner cladding and the core.
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