Exhaust gas oxygen measuring apparatus and exhaust gas oxygen measuring system including the same

Abstract

The present invention relates to an exhaust gas oxygen measuring apparatus installed to measure oxygen in exhaust gas discharged from a semiconductor process or the like, and an exhaust gas oxygen measuring system having the same. The exhaust gas oxygen measuring apparatus is configured to be repairable in an uninterrupted state and includes a pipe connection body installed on a path of an exhaust pipe through which exhaust gas is discharged. The pipe connection body has connectors on both sides thereof. The apparatus further includes an oxygen measuring sensor installed at one of the connectors of the pipe connection body to irradiate light and measure oxygen concentration using reflected light, and a reflecting device installed at the other connector of the pipe connection body to reflect the light irradiated from the oxygen measuring sensor. The apparatus further includes a protection member including a first protection member for protecting the oxygen measuring sensor and a second protection member for protecting the reflecting device from the exhaust gas, and an exhaust gas blocking member including a first blocking valve and a second blocking valve installed to open and close the connectors on both sides.

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