Semiconductor device and method of manufacturing

Abstract

Heater designs for a photonic integrated circuit and methods of making such heater designs are disclosed herein. The heater design surrounds a waveguide / optical modulator. In some embodiments, a Peltier-effect heater is present on one surface of the waveguide. At least one trench wire is present on the opposite surface of the waveguide. Via wires on opposite sides of the waveguide electrically connect the trench wire to a p-junction and an n-junction of the Peltier-effect heater. In other embodiments, two metal portions are present on opposite surfaces of the waveguide. Via wires on opposite sides of the waveguide electrically connect the two metal portions. The two metal portions are made of different materials, and have different cross-sectional areas.