Field etch to enhance image sharpness of augmented reality waveguide combiners

TW202630063APending Publication Date: 2026-07-16APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2024-06-28
Publication Date
2026-07-16

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Abstract

The present disclosure provides waveguides and methods of forming thereof. The waveguides include a plurality of gratings. The plurality of gratings include grating structures disposed over a waveguide substrate. The grating structures include a grating depth. A waveguide layer is disposed over the waveguide substrate between each of the plurality of gratings and an edge of the waveguide substrate. The waveguide layer has an etch depth. The etch depth is less than the grating depth.
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