Heater for scrubber in a light source
TW202630139APending Publication Date: 2026-07-16ASML NETHERLANDS BV
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Patent Information
- Application Number
- TW114139905
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-10-24
- Filing Date
- 2025-10-16
- Publication Date
- 2026-07-16
Abstract
A radiation source includes a source vessel configured to generate an extreme ultraviolet light, and a scrubber. The scrubber includes a housing and a plurality of fins arranged in the housing. One or more fins in the plurality of fins contain a heating element disposed across a surface of the fin, and the heating element is positioned in a flow volume of the scrubber.
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