Ranking anomalous sensor by criticality using causal inference techniques
TW202630155APending Publication Date: 2026-07-16APPLIED MATERIALS INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-10-15
- Publication Date
- 2026-07-16
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Abstract
Embodiments described herein relate to a method that includes generating weighted causal graph for a tool through with an informational theory probabilistic approach and / or a statistical approach. In an embodiment, the method further includes generating a criticality score for each of a plurality of nodes within the weighted causal graph, and generating a weighted anomaly score for each of the plurality of nodes. In an embodiment, the weighted anomaly score is calculated based on the criticality score of one or more nodes within a causal group for a given node and a fault metric of the given node. In an embodiment, the method further includes ranking the plurality of nodes based on the weighted anomaly score of each of the plurality of nodes.
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