Radio frequency generator monitoring

Abstract

A method includes receiving, from an alternating current (AC) power sensor, AC power data provided from an AC power source to a radio frequency (RF) generator. The RF generator is configured to provide RF power to a processing chamber of a substrate processing system. The method further includes determining, based on fluid temperature data and fluid flow rate data, heat dissipation data. The fluid temperature data and the fluid flow rate data are associated with cooling fluid flow to the RF generator. The method further includes causing, based on at least one of the heat dissipation data or the AC power data, performance of a corrective action associated with substrate processing via the substrate processing system.

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