Ion source with extended charge life

Abstract

An ion source that is capable of extending the life of a charge material in a vaporizer is disclosed. A controller uses information about the desired beam current and the amount of charge material remaining in the vaporizer to determine the temperature experienced by the vaporizer. The temperature of the vaporizer determines the rate at which the charge material is consumed. By considering both the amount of charge material left, as well as the desired beam current, the temperature of the vaporizer may be maintained at a lower temperature than would otherwise be possible. This serves to extend the life of the charge material, while still supplying the desired beam current.

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