Multicharged particle beam mapping method, multicharged particle beam mapping device and computer program product

Abstract

This invention relates to a multi-charged particle beam mapping method, a multi-charged particle beam mapping apparatus, and a computer program product for mapping patterns in a manner that does not affect the mapping results due to the anisotropy of the beam characteristics. The multi-charged particle beam mapping method according to this embodiment includes: the step of setting a plurality of mapping grids in the mapping area of ​​a sample, wherein the plurality of mapping grids are obtained by displacing a plurality of ideal grids arranged in a lattice pattern at equal intervals in a manner that allows for anisotropic displacement; and the step of mapping a pattern on the sample by using a plurality of beams to irradiate the plurality of mapping grids.

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