System and method for thermal management of a laser system
TW202630517APending Publication Date: 2026-07-16APPL MATERIALS ISRAEL LTD
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- APPL MATERIALS ISRAEL LTD
- Filing Date
- 2025-10-17
- Publication Date
- 2026-07-16
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Figure TWG2TA001068798_001 
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Figure TWG2TA001068798_003
Abstract
A system and method for thermal management of an optical system. The system comprises at least one laser unit configured for operating in periods of at least a first high power output mode and a second low power output mode, an optical arrangement configured for receiving output beam of the at least one laser unit and for directing the input beam for generating at least one illumination spot having at least one of a selected spot location and selected spot parameters, and a thermal management system. Wherein the thermal management module is configured and operable for maintaining increased thermal conditions of the optical arrangement when the at least one laser unit is in the second low power output mode.
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