RF power supply debugging methods and RF power supply systems

Abstract

A debugging method and system for an RF power supply are disclosed. The RF power supply is connected to an analog load. The debugging method includes the following steps: the RF power supply varies its frequency and outputs an electrical signal to the analog load, recording the frequency value and the corresponding virtual reactance value; a selected VSWR is determined, the frequency value corresponding to the selected VSWR is selected as the target frequency value, and the virtual reactance value corresponding to the target frequency value is selected as the target virtual reactance value; a linear relationship is established between the frequency value and the corresponding virtual reactance value, and normalization is performed; the position corresponding to the target frequency value and the target virtual reactance value is determined as a reference position. This invention records the frequency value and the corresponding virtual reactance value by varying the frequency, and determines the position corresponding to the target frequency value and the target virtual reactance value as a reference position, ensuring that the output power signal meets impedance matching requirements and avoiding a reduction in the efficiency of power amplifier conversion and power input to the analog load.

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