Phase synchronization circuits, radio frequency power supplies, and semiconductor manufacturing equipment

Abstract

This application provides a phase synchronization circuit, an RF power supply, and semiconductor manufacturing equipment, applicable to the field of semiconductor manufacturing equipment technology. The circuit includes a phase-locked loop (PLL) module, a phase adjustment module, and a signal output module with a first output port and a second output port. The PLL module generates a target clock signal based on a synchronization signal or a reference clock signal from a preceding stage. The signal output module provides a drive signal and a synchronization signal in phase based on the target clock signal. The first output port outputs a drive signal to the RF circuit, causing the RF circuit to output an RF signal according to the drive signal. The second output port outputs a synchronization signal to the subsequent phase synchronization circuit. The phase adjustment module determines a target phase offset based on the RF power of the RF signal. The signal output module adjusts the phase of the drive signal according to the target phase offset, so that the phase of the RF signal output by the RF circuit reaches the target phase, thereby meeting practical application requirements.

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