An impedance detection circuit, an impedance matching device, and a semiconductor manufacturing apparatus.

Abstract

This application discloses an impedance detection circuit, an impedance matching device, and a semiconductor manufacturing apparatus, including a center conductor, a first winding, a second winding, a capacitor, and a processing circuit. The center conductor is connected in series between the RF power supply and the load. The first end of the capacitor is connected to the center conductor, and the second end is connected to both the first winding and the second winding. The first end of the first winding and the first end of the second winding are both connected to a first node, and the second end of both the first winding and the second winding are both connected to a second node. The processing circuit is connected to the first node and the second node, respectively, and is used to obtain the current signal and voltage signal of the center conductor based on the first voltage signal of the first node and the second voltage signal of the second node. Therefore, it can accurately identify and sample the current and voltage of the RF power supply over a wider range.

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