A radio frequency power supply and semiconductor manufacturing apparatus

Abstract

This application provides an RF power supply and semiconductor manufacturing apparatus, including: a power supply voltage control submodule connected to a switching power supply module for controlling the DC output voltage of the switching power supply module; an RF control submodule connected to the RF module for controlling the power and frequency of the RF signal output by the RF module; a power sampling module connected to the RF module for acquiring the power feedback value of the RF signal output by the RF module; and a processor submodule connected to the power supply voltage control submodule, the RF control submodule, and the power sampling module for outputting control signals to the power supply voltage control submodule and the RF control submodule based on the power feedback value and the frequency of the RF signal, so that the RF module outputs the required RF signal. This application embodiment can improve the output efficiency of the RF module.

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