Transition tube component and semiconductor processing equipment

Abstract

This application provides a transition tube component and semiconductor processing equipment. The transition tube component includes: a transition tube; an intake pipe, which passes through the transition tube, with a first end located outside the transition tube and a second end located inside the transition tube; a vaporization mechanism, arranged at the second end of the intake pipe, the vaporization mechanism having a heating device and a liquid collection chamber, with the second end of the intake pipe located inside the liquid collection chamber. The liquid collection chamber is in communication with the interior of the transition tube and is used to collect condensate from the intake pipe, while the heating device is used to heat and vaporize the collected condensate. The transition tube component of this application collects condensate through the liquid collection chamber of the vaporization mechanism and vaporizes the collected condensate using the heating device. This can effectively solve the problem of excessive particles in the reaction chamber and improve product quality.

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