Substrate carrier load apparatus, substrate processing system and method for operating the substrate carrier load apparatus

Abstract

The present disclosure relates to a substrate carrier load apparatus, in which a substrate carrier is seated on a load port to provide the substrate to a process chamber, a substrate processing system, and a method for operating the substrate carrier load apparatus. The substrate carrier load apparatus includes: a load port which is provided at one side of a loading chamber in a first direction and on which a substrate carrier accommodating a substrate and transferred by a carrier transfer unit is seated so as to perform loading or unloading of the substrate with respect to the loading chamber; and a buffer section provided above the load port and configured to support and temporarily store one or more substrate carriers.

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