substrate holding device

Abstract

The purpose of this invention is to provide a substrate holding device capable of synchronous control of the rotation axis and minute load control. An embodiment of the substrate holding device includes: a first holding portion that holds a plate member for bonding the first substrate and a second substrate from the side of the first substrate; a second holding portion that holds the plate member from the side of the second substrate; a first rotating shaft connected to the first holding portion; a second rotating shaft connected to the second holding portion and having a rotating center shaft coaxial with the rotating center axis of the first rotating shaft; a first prime mover connected to the first rotating shaft and rotating the first rotating shaft; a second prime mover connected to the second rotating shaft and rotating the second rotating shaft synchronously with the first rotating shaft; a first housing disposed outside the first rotating shaft; a second housing disposed outside the second rotating shaft; a first ejection portion that ejects fluid between the first rotating shaft and the first housing; and a second ejection portion that ejects fluid between the second rotating shaft and the second housing.

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