Apparatus and method for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks

Abstract

The present invention relates to a device for cleaning pot-shaped hollow bodies , in particular transport containers for semiconductor wafers or for EUV lithography masks, comprising a device wall which encloses an interior space , a gripping and moving device arranged in the interior space for moving the hollow body within the interior space , a cleaning unit arranged in the interior space , with which the hollow body can be cleaned, and an inspection device arranged in the interior space with tactile or contactless inspection means for checking the functionality and / or alignment of the hollow body. Furthermore, the present invention relates to a method for operating such a device and a computer program product for carrying out such a method.

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