Laser processing equipment, mask management device and mask management method

Abstract

[Problem] In a laser processing apparatus, laser processing is performed while properly managing the mask. [Solution] The laser processing apparatus 100 includes an information management unit 200 and a mask management unit 220 that manages the usage status of each mask stored in the mask storage unit 70. During laser processing, the selected mask is virtually divided into a grid, and the number of laser beam pulses equivalent to the irradiation energy of the linear laser beam LB irradiating each grid is determined based on the scanning range. Then, the determined number of pulses is added to the total number of pulses so far, and the accumulated number of pulses is recorded.

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