Leveling platform

Abstract

A leveling platform is provided, including: a base; at least three leveling adjustment modules arranged on the base, each of the leveling adjustment modules comprising a movable seat and a supporting portion, wherein a first inclined section of the supporting portion is disposed in an inclined and slidable manner on a second inclined section of the movable seat; at least one drive mechanism, including a driving motor and a braking mechanism, the driving motor being configured to drive the movable seat to slide relative to the supporting portion; and a platform disposed on the at least three leveling adjustment modules.

Description

Technical Field

[0001] This invention relates to adjustment platforms, and in particular to a technical improvement of a horizontally adjustable platform. Prior Technology

[0002] Currently, most common alignment platforms on the market are used in semiconductor manufacturing, optoelectronic detection, precision machining and biomedical experiments. Their main purpose is to perform high-precision X, Y axis and rotation angle adjustments on workpieces or optical components, and they can be combined with CCD vision systems to achieve automated inspection and assembly.

[0003] However, in wafer alignment, optical lens assembly calibration, and other processes, fine-tuning of the height and level of the workpiece is required. Conventional technologies can only provide adjustment methods for level adjustment and horizontal angle rotation, which is clearly insufficient.

[0004] Therefore, it is necessary to provide a novel and progressive horizontal adjustment platform to solve the above problems. Summary of the Invention

[0005] The main objective of this invention is to provide a leveling platform that can adjust the level of the platform and provide a braking function.

[0006] To achieve the above objectives, the present invention provides a horizontal adjustment platform, comprising: a base; at least three horizontal adjustment modules disposed on the base, each horizontal adjustment module including a movable seat and a support portion, wherein a first inclined portion of the support portion is obliquely slidably disposed on a second inclined portion of the movable seat; at least one drive mechanism including a drive motor and a braking mechanism, the drive motor being capable of driving the movable seat to slide relative to the support portion; and a platform disposed on the at least three horizontal adjustment modules. Simple Explanation of the Diagram

[0007] Figure 1 is a perspective view of a first embodiment of the present invention.

[0008] Figure 2 is an exploded view of a first embodiment of the present invention.

[0009] Figure 3 is a perspective view of the horizontal adjustment module according to a first embodiment of the present invention.

[0010] Figure 4 is an exploded view of the horizontal adjustment module of a first embodiment of the present invention.

[0011] Figure 5 is another exploded view of the horizontal adjustment module of a first embodiment of the present invention.

[0012] Figures 6 and 7 are animation diagrams of a first embodiment of the present invention.

[0013] Figures 8 and 9 are another animation diagram of a first embodiment of the present invention.

[0014] Figures 10 and 11 are animated diagrams of one of the second embodiments of the present invention. Implementation

[0015] The following examples illustrate possible implementations of the present invention, but are not intended to limit the scope of protection of the present invention. The use of "a" or "at least one" before the terms mentioned herein is not a limitation on the quantity, and may also be "multiple" depending on the requirements. Such variations in quantity are also within the scope of protection, and are therefore stated in advance.

[0016] Please refer to Figures 1 to 9, which show a first embodiment of the present invention. The horizontal adjustment platform 1 of the present invention includes a base 10, at least three horizontal adjustment modules 20, at least two drive mechanisms 30, and a platform 40.

[0017] The at least three horizontal adjustment modules 20 are respectively spaced apart on the base 10. Each horizontal adjustment module 20 includes a movable seat 21 and a support portion 22. A first inclined portion 23 of the support portion 22 is obliquely slidably disposed on a second inclined portion 24 of the movable seat 21. The at least two drive mechanisms 30 are disposed on the at least two horizontal adjustment modules 20. The at least two drive mechanisms 30 respectively include a drive motor 31 and a brake mechanism 32. The drive motor 31 of each drive mechanism 30 can drive the movable seat 21 to slide relative to the support portion 22. The platform 40 is disposed on the at least three horizontal adjustment modules 20.

[0018] In this embodiment, the drive motor 31 is a servo motor combined with a screw (i.e., drive rod 33). In other embodiments, it can also be a magnetically driven linear guide, or a hydraulic or pneumatic cylinder.

[0019] In this embodiment, the horizontal adjustment platform 1 includes four horizontal adjustment modules 20, which are respectively located at the four corners of the base 10.

[0020] The braking mechanism 32 can selectively activate or deactivate the brake; when the braking mechanism 32 activates the brake, the support portion 22 and the movable seat 21 cannot move relative to each other. When the adjustment of the platform 40 is stopped, the rotation of the drive motor 31 is stopped and the braking mechanism 32 is activated; when the adjustment of the platform 40 begins, the rotation of the drive motor 31 is activated and the braking mechanism 32 is deactivated. It should be noted that the order in which the drive motor 31 and the braking mechanism 32 are activated and deactivated is not limited in either of the aforementioned states.

[0021] In use, the drive motor 31 can drive the movable seat 21 to move horizontally relative to the base 10 (such as along the X-axis or along the Y-axis), so that the bearing part 22 can move obliquely up and down along the second inclined part 24 of the movable seat 21, so as to move and lift the platform 40 along the Z-axis direction, so as to adjust the horizontal state of the platform 40.

[0022] This allows for precise adjustment and fine-tuning of the horizontal state of the platform 40, and enables the braking function to stabilize the platform 40, preventing the first tilting part 23 and the second tilting part 24 from sliding relative to each other at an angle.

[0023] The leveling platform 1 includes at least three drive mechanisms 30. One drive rod 33 of each drive motor 31 is connected to the movable seat 21 of one of the leveling modules 20. The drive rod 33 can movably drive the movable seat 21 to move. In this embodiment, the drive rod 33 is a screw, and the movable seat 21 can move along the direction of the screw. In this way, the at least three drive mechanisms 30 can operate independently to independently adjust each movable seat 21, thereby adjusting the local level position of the platform 40 and improving the accuracy of leveling.

[0024] Preferably, the braking mechanism 32 is disposed on the drive motor 31, and when the braking mechanism 32 is activated, it can prevent the drive rod 33 from moving. Further, the braking mechanism 32 may include a fixed plate and a movable plate respectively disposed on the drive rod 33, using braking to press the plates against the fixed plate and the movable plate to stop the rotation of the drive rod 33. In other embodiments, other braking mechanisms may also be used, and it is not limited to these. Furthermore, in other embodiments, the braking mechanism may also be disposed on the base, the movable seat, or the support portion to prevent the movable seat from moving.

[0025] At least one of the horizontal adjustment modules 20 has a support portion 25 on its supporting portion 22. The support portion 25 has an arcuate protrusion 26 protruding from the supporting portion 22, which abuts against the platform 40. Preferably, the platform 40 has at least one groove 41 on the side facing the at least three horizontal adjustment modules 20, and the arcuate protrusion 26 is inserted into the at least one groove 41. Each arcuate protrusion 26 may be integrally formed on the arcuate protrusion of the supporting portion 22, or it may be a sphere rotatably mounted on the supporting portion 22. In this embodiment, the platform 40 has at least three grooves 41 on the side facing the at least three horizontal adjustment modules 20, and each groove 41 is an arcuate groove, and each arcuate protrusion 26 can be inserted into one of the grooves 41. To further explain, each of the grooves 41 and each of the arcuate protrusions 26 can move relatively freely, with a small contact area between them. This allows the platform 40 to have room for slight rotation, swaying, or angle correction during lifting and adjustment, reducing the accumulation of stress and torque on the structure and providing accurate leveling.

[0026] Each movable seat 21 of the horizontal adjustment module 20 and the adjacent plurality of movable seats 21 of the horizontal adjustment module 20 can move relative to the base 10 in different directions; as shown in Figure 9, one movable seat 21 can move along the X-axis direction, and another movable seat 21 can move along the Y-axis direction; providing a large range of motion for each movable seat 21 without interfering with each other; in addition, it can prevent other movable seats 21 from shifting when a single movable seat 21 is moved and adjusted, thereby improving the accuracy of horizontal adjustment.

[0027] The base 10 is further provided with at least three first tracks 11 extending in the horizontal direction and at least three second tracks 12 extending in the vertical direction. One of the third tracks 27 of each movable seat 21 can be slidably disposed on one of the first tracks 11, and one of the fourth tracks 28 of each bearing part 22 can be slidably disposed on one of the second tracks 12. Furthermore, the first inclined part 23 is provided with a first inclined slide rail 231 extending in an oblique direction, and the second inclined part 24 is provided with a second inclined slide rail 241 extending in an oblique direction. The first inclined slide rail 231 can be slidably disposed on the second inclined slide rail 241. In this way, each movable seat 21 and each bearing part 22 can move along a precise path, and in particular, each bearing part 22 can move up and down stably without shaking or deviating.

[0028] Please refer to Figures 10 and 11, which show a second embodiment of the present invention. Each horizontal adjustment module 20a further includes a measuring device 50, which can measure the position of the support portion 22. In this embodiment, the measuring device 50 is an optical measuring device. In other embodiments, the measuring device may also be a magnetic measuring device, which includes a measuring ruler. Specifically, the measuring device 50 includes a movable optical ruler 51 and a reading head 52. One of the optical ruler 51 and the reading head 52 is located on the platform 40, and the other is located on the support portion 22 and corresponds to the optical ruler 51. In this embodiment, the platform 40 is provided with the reading head 52, and the support portion 22 is provided with the optical ruler 51. This allows a control mechanism to determine the position of the support portion 22 based on the measuring device 50, and then control at least one driving mechanism 30 to drive based on the position of the support portion 22, so as to accurately measure and adjust the position of the support portion 22 and achieve a high-precision horizontal correction and alignment effect.

[0029] 1: Horizontal adjustment platform

[0030] 10: Base

[0031] 11: First Track

[0032] 12: Second Track

[0033] 20,20a: Horizontal adjustment module

[0034] 21: Activity Seat

[0035] 22: Bearing section

[0036] 23: First inclined section

[0037] 231: First tilting slide rail

[0038] 24: Second inclined section

[0039] 241: Second tilting slide rail

[0040] 25: Support section

[0041] 26: Arc-shaped convex part

[0042] 27: Third Track

[0043] 28: Fourth Track

[0044] 30: Drive mechanism

[0045] 31: Drive motor

[0046] 32: Braking mechanism

[0047] 33: Drive lever

[0048] 40: Platform

[0049] 41: Groove

[0050] 50: Measuring device

[0051] 51: Optical ruler

[0052] 52: Reader

Claims

1. A horizontal adjustment platform, comprising: A base; At least three horizontal adjustment modules are spaced apart from each other on the base. Each horizontal adjustment module includes a movable seat and a support portion. A first inclined portion of the support portion is obliquely slidably disposed on a second inclined portion of the movable seat. At least two drive mechanisms are disposed on at least two of the horizontal adjustment modules. Each drive mechanism includes a drive motor and a brake mechanism. The drive motor of each drive mechanism can drive the movable seat to slide relative to the support portion. A platform is disposed on the at least three horizontal adjustment modules.

2. The leveling platform as described in claim 1, wherein the braking mechanism is selectable to activate or deactivate the brake; wherein, When the braking mechanism is activated, the supporting part and the movable seat cannot be displaced relative to each other.

3. The leveling platform as claimed in claim 1, comprising at least three drive mechanisms, wherein one of the drive motors has a drive rod connected to the movable seat of one of the leveling modules, and the drive rod movably drives the movable seat to move.

4. The leveling platform as described in claim 3, wherein the braking mechanism is located on the drive motor, and the braking mechanism can prevent the drive rod from moving when the brake is activated.

5. The leveling platform as claimed in claim 1, wherein each leveling module further includes a measuring device capable of measuring the position of the support portion.

6. The leveling platform as claimed in claim 1, wherein at least one of the leveling modules has a support portion on its load-bearing portion, the support portion having an arcuate protrusion protruding from the load-bearing portion and the arcuate protrusion abutting against the platform.

7. The horizontal adjustment platform as claimed in claim 6, wherein the platform has at least one groove on one side facing the at least three horizontal adjustment modules, and the arcuate protrusion engages in the at least one groove.

8. The leveling platform as claimed in claim 1, wherein the movable seat of each leveling module and the movable seats of adjacent plurality of leveling modules move relative to the base in different directions.

9. The horizontal adjustment platform as claimed in claim 1, wherein each of the bases is further provided with a first track extending in a horizontal direction and a second track extending in a vertical direction, a third track of the movable seat is slidably disposed on the first track, and a fourth track of the support portion is slidably disposed on the second track.

10. The leveling platform as described in claim 7, wherein the braking mechanism is selectable to activate or deactivate the brake; wherein, When the braking mechanism is activated, the support portion and the movable seat cannot move relative to each other; the horizontal adjustment platform includes at least three drive mechanisms, one drive rod of each drive motor is connected to the movable seat of one of the horizontal adjustment modules, and the drive rod can movably drive the movable seat to move; the drive rod is a screw, and the movable seat can move along the direction of the screw's extension; the braking mechanism is located on the drive motor, and when the braking mechanism is activated, it can prevent the drive rod from moving; each horizontal adjustment module further includes a measuring device, which can measure the position of the support portion; the platform has a side facing the at least three horizontal adjustment modules with up to The base has at least three grooves; the movable seat of each horizontal adjustment module and the movable seats of the adjacent plurality of horizontal adjustment modules move relative to the base in different directions; the base is further provided with at least three first tracks extending in the horizontal direction and at least three second tracks extending in the vertical direction, one of the third tracks of each movable seat can be slidably disposed on one of the first tracks, and one of the fourth tracks of each bearing part can be slidably disposed on one of the second tracks; the first inclined part is provided with a first inclined slide rail extending obliquely, the second inclined part is provided with a second inclined slide rail extending obliquely, and the first inclined slide rail is slidably disposed on the second inclined slide rail.

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