Alignment platform

Abstract

A alignment platform is provided, including: a base; a stage; and an adjustment module disposed on the base and configured to drive the stage to move. The adjustment module includes at least one height adjustment module, at least one XY adjustment module, and at least one first driving mechanism. Each height adjustment module includes a movable seat and a support portion, wherein the support portion is disposed on the movable seat and can slide obliquely relative thereto. The at least one first driving mechanism can drive at least one of the movable seats to move. Each XY adjustment module includes an X-axis moving platform and a Y-axis moving platform.

Description

Technical Field

[0001] The present invention relates to an alignment platform, and in particular to a technical improvement of an alignment platform capable of adjusting the X, Y and Z axis directions. Prior Art

[0002] Alignment platforms play a crucial role in the semiconductor and optical component assembly, precision machining, and inspection industries. Typically, alignment platforms are used for adjustment and correction in the X and Y axes to ensure processing or measurement accuracy, as demonstrated in Taiwan Patent No. I390144. With industrial advancements, many processes no longer rely solely on X and Y axis movement; they also require correction in multiple dimensions, including height. For example, during wafer alignment or optical lens calibration, even slight workpiece tilt or height deviation can lead to image defocus, poor component alignment, and inaccurate measurement results.

[0003] Therefore, it is necessary to provide a novel and advanced alignment platform to solve the above problems. Summary of the Invention

[0004] The main purpose of the present invention is to provide an alignment platform that can provide multiple correction adjustments in the Z-axis, X-axis and Y-axis directions.

[0005] To achieve the above-mentioned objectives, the present invention provides a positioning platform, which includes: a base; a carrier; and an adjustment module, which is arranged on the base and can drive the carrier to move, the adjustment module includes at least one height adjustment module, at least one XY adjustment module and at least one first driving mechanism, each of the height adjustment modules includes a movable seat and a supporting part, the supporting part is arranged on the movable seat and can slide obliquely relative to it, the at least one first driving mechanism can drive at least one of the movable seats to move, and each of the XY adjustment modules includes an X-axis moving platform and a Y-axis moving platform. Simple diagram description

[0006] FIG1 is a perspective view of an embodiment of the present invention.

[0007] FIG2 is an exploded view of an embodiment of the present invention.

[0008] FIG3 is a perspective view of an adjustment module according to an embodiment of the present invention.

[0009] FIG. 4 is a diagram illustrating the XY adjustment module in use according to an embodiment of the present invention.

[0010] FIG. 5 is an exploded view of an adjustment module according to an embodiment of the present invention.

[0011] FIG. 6 is another exploded view of the adjustment module according to an embodiment of the present invention.

[0012] FIG. 7 is a side view of an adjustment module according to an embodiment of the present invention.

[0013] FIG. 8 is a diagram illustrating the Z-axis and Y-axis direction adjustments according to an embodiment of the present invention.

[0014] 9 and 10 are diagrams illustrating the horizontal adjustment operation according to an embodiment of the present invention.

[0015] 11 and 12 are diagrams showing the X-axis and Y-axis direction adjustments according to an embodiment of the present invention. Implementation Method

[0016] The following examples are merely illustrative of possible implementations of the present invention and are not intended to limit the scope of protection sought by the present invention. The phrases "one" or "at least one" preceding any of the nouns herein do not limit the quantity; the number may be "plural" based on needs. Such variations in quantity also fall within the scope of protection sought, and are therefore clearly stated.

[0017] Please refer to Figures 1 to 12, which show an embodiment of the present invention. The alignment platform 1 of the present invention includes: a base 10, a carrier 20 and an adjustment module 6.

[0018] The adjustment module 6 is arranged on the base 10 and can drive the carrier 20 to move. The carrier 20 can be used to place an object. The adjustment module 6 includes at least one height adjustment module 30, at least one XY adjustment module 50, 50a, 50b and at least one first driving mechanism 60. Each of the height adjustment modules 30 includes a movable seat 31 and a supporting part 32. The supporting part 32 is arranged on the movable seat 31 and can slide obliquely relative to it. The at least one first driving mechanism 60 can drive at least one of the movable seats 31 to move. Each of the XY adjustment modules 50, 50a, 50b includes an X-axis moving platform 51 and a Y-axis moving platform 52.

[0019] This allows for precise calibration and adjustment via multiple adjustment mechanisms along the Z, X, and Y axes, including horizontal adjustment (as shown in Figure 12), tilt correction (as shown in Figures 9 and 10), and rotation angle correction (θ angle), enabling fast and accurate calibration and alignment.

[0020] Specifically, the supporting portion 32 of each height adjustment module 30 has a first inclined portion 321, and the movable seat 31 of each height adjustment module 30 has a second inclined portion 311. The first inclined portion 321 is provided with a first inclined slide rail 322 extending obliquely, and the second inclined portion 311 is provided with a second inclined slide rail 312 extending obliquely. The first inclined slide rail 322 is slidably provided on the second inclined slide rail 312. The base 10 is further provided with a plurality of first rails 11 extending in the horizontal direction and a plurality of A third track 313 of each movable seat 31 can be slidably disposed on the second track 12 extending in the vertical direction along one of the first tracks 11, and a fourth track 323 of each supporting portion 32 can be slidably disposed on the second track 12 along one of the second tracks 12. In this embodiment, each first track 11 and one of the second tracks 12 are L-shaped. In this way, each movable seat 31 and each supporting portion 32 can move along a precise path, and in particular, each supporting portion 32 can more stably move up and down without shaking or deflecting.

[0021] In this embodiment, the at least one XY adjustment module 50, 50a, 50b and the at least one height adjustment module 30 are disposed relative to each other in a Z-axis direction 4, which is transverse to an X-axis direction 2 and a Y-axis direction 3. In this embodiment, the XY adjustment modules 50, 50a, 50b are located on the supporting portion 32. In other embodiments, the height adjustment module 30 may be located above the XY adjustment modules 50, 50a, 50b. Preferably, the adjustment module 6 includes a plurality of the height adjustment modules 30 and a plurality of the XY adjustment modules 50, 50a, 50b, each of the XY adjustment modules 50, 50a, 50b being disposed within one of the height adjustment modules 30. One of the X-axis movable platforms 51 can be driven by a second drive mechanism 80 to move along the X-axis direction 2, and one of the Y-axis movable platforms 52 can be driven by a third drive mechanism 70 to move along the Y-axis direction 3. The multiple height adjustment modules 30 and the multiple XY adjustment modules 50, 50a, 50b can be operated simultaneously or independently, allowing precise adjustment of the position of the carrier 20 as needed. Furthermore, the multiple XY adjustment modules 50, 50a, 50b can provide adjustment in the X-axis direction 2, the Y-axis direction 3, and angle (θ direction). Other embodiments may include the multiple height adjustment modules 30 and one XY adjustment module 50, 50a, 50b, but are not limited thereto.

[0022] Each of the first drive mechanism 60, each of the second drive mechanism 80, and each of the third drive mechanism 70 is a servo motor coupled to a drive rod 61 (screw). In other embodiments, a magnetically driven linear guide rail, or a hydraulic or pneumatic cylinder may also be used.

[0023] The adjustment module 6 includes at least two second drive mechanisms 80, each of which is mounted on at least two of the X-axis movable platforms 51. In other embodiments, the adjustment module 6 may include at least two third drive mechanisms 70, each of which is mounted on at least two of the Y-axis movable platforms 52. Further, the plurality of XY adjustment modules 50, 50a, 50b is at least three in number, preferably four. In this embodiment, the base 10 defines a central axis 5, and the plurality of height adjustment modules 30 are spaced apart around the central axis 5. At least two of the diagonally disposed XY adjustment modules 50a, 50b are each equipped with a third drive mechanism 70. Therefore, an XY adjustment module 50a is provided with an active drive adjustment function via the second drive mechanism 80 and the third drive mechanism 70, and an XY adjustment module 50b is provided with an active drive adjustment function via the second drive mechanism 80. The remaining plurality of XY adjustment modules 50 are driven to move synchronously. The design of the actively driven XY adjustment module 50a and the XY adjustment module 50b, and the passively driven XY adjustment module 50, provides flexible calibration and adjustment, simplifies the overall structure, and facilitates installation.

[0024] The adjustment module 6 includes a plurality of first drive mechanisms 60. Each first drive mechanism 60 has a drive rod 61 connected to the movable seat 31 of one of the height adjustment modules 30. The drive rod 61 can flexibly drive the movable seat 31. In this embodiment, the drive rod 61 is a screw, and the movable seat 31 can move along the direction in which the screw 61 extends. Thus, the plurality of first drive mechanisms 60 can be independently actuated to independently adjust each movable seat 31, thereby adjusting the local horizontal position (vertical height) of the platform 20 and improving the accuracy of the calibration level.

[0025] The movable base 31 of each height adjustment module 30 and the movable bases 31 of adjacent height adjustment modules 30 move relative to the base 10 in different directions. As shown in FIG2 , one movable base 31 can move along the X-axis direction 2, and another movable base 31 can move along the Y-axis direction 3. This provides a large range of movement for each movable base 31 without interfering with each other. In addition, this prevents the other movable bases 31 from being offset when a single movable base 31 is moved and adjusted, thereby improving the accuracy of horizontal adjustment.

[0026] Each height adjustment module 30 further includes a measuring device 90 capable of measuring the position of the support portion 32. In this embodiment, the measuring device 90 is an optical measuring device. In other embodiments, the measuring device may also be a magnetic measuring device including a magnetic measuring scale. Specifically, the measuring device 90 includes a relatively movable optical scale 91 and a read head 92. One of the optical scale 91 and the read head 92 is disposed on the base 10, and the other is disposed on the support portion 32 and corresponds to the optical scale 91. In this embodiment, the read head 92 is disposed on the base 10, and the optical scale 91 is disposed on the support portion 32. A control mechanism can thereby determine the position of the support portion 32 based on each measuring device 90. Based on the position of the support portion 32, the at least one first drive mechanism 60 is controlled to drive, thereby accurately measuring and adjusting the position of the support portion 32, achieving high-precision horizontal alignment.

[0027] The adjustment module 6 includes at least one (or more) curved convex portion 53. The at least one (or more) curved convex portion 53 is disposed on the at least one (or more) height adjustment module 30 or the at least one (or more) XY adjustment module 50, 50a, 50b. The at least one (or more) curved convex portion 53 abuts against the carrier 20. Preferably, the carrier 20 has at least one (or more) recessed groove 21 formed on a side facing the adjustment module 6, and the at least one (or more) curved convex portion 53 snaps into the at least one (or more) recessed groove 21. Specifically, each curved convex portion 53 can be integrally formed with the XY adjustment module 50, 50a, 50b, or can be a spherical body rotatably mounted on the XY adjustment module 50, 50a, 50b. To further illustrate, each of the grooves 21 and each of the arc-shaped protrusions 53 can move relatively freely, with a small contact area between them. This allows the platform 20 to have room for slight rotation, swing, or angle correction during lifting and adjustment, reducing stress and torque accumulation on the structure and providing accurate horizontal correction of the platform 20.

[0028] 1: Positioning platform

[0029] 2: X-axis direction

[0030] 3: Y-axis direction

[0031] 4: Z-axis direction

[0032] 5: Central axis

[0033] 6: Adjust the module

[0034] 10: Base

[0035] 11: First Track

[0036] 12: Second Track

[0037] 20: Carrier

[0038] 21: Groove

[0039] 30: Height adjustment module

[0040] 31: Movable seat

[0041] 311: Second inclined portion

[0042] 312: Second inclined slide rail

[0043] 313: The Third Track

[0044] 32: bearing part

[0045] 321: first inclined portion

[0046] 322: First inclined slide rail

[0047] 323: The Fourth Track

[0048] 50,50a,50b:XY adjustment module

[0049] 51:X-axis moving platform

[0050] 52: Y-axis moving platform

[0051] 53: arc convex part

[0052] 60: First driving mechanism

[0053] 61: Drive rod

[0054] 70: Third driving mechanism

[0055] 80: Second driving mechanism

[0056] 90: Measuring device

[0057] 91: Optical ruler

[0058] 92: Read head

Claims

1. A positioning platform, comprising: a base; One carrier; and an adjustment module, which is provided on the base and can drive the carrier to move, including at least one height adjustment module, at least one XY adjustment module and at least one first driving mechanism, each of the height adjustment modules includes a movable seat and a bearing part, the bearing part is provided on the movable seat and can slide relatively obliquely, the at least one first driving mechanism can drive at least one of the movable seats to move, and each of the XY adjustment modules includes an X-axis moving platform and a Y-axis moving platform.

2. The alignment platform of claim 1, wherein the at least one XY adjustment module and the at least one height adjustment module are disposed relative to each other in a Z-axis direction, and the Z-axis direction is transverse to an X-axis direction and a Y-axis direction.

3. The alignment platform of claim 2, wherein the adjustment module comprises a plurality of the height adjustment modules and a plurality of the XY adjustment modules, each of the XY adjustment modules being disposed on one of the height adjustment modules; wherein one of the X-axis movable platforms can be driven by a second driving mechanism to move along the X-axis direction, and wherein one of the Y-axis movable platforms can be driven by a third driving mechanism to move along the Y-axis direction.

4. The alignment platform according to claim 3, wherein the adjustment module comprises at least two second driving mechanisms, and the at least two second driving mechanisms are disposed on at least two of the X-axis moving platforms.

5. The alignment platform as described in claim 3, wherein the adjustment module includes a plurality of first driving mechanisms, a driving rod of each first driving mechanism is connected to the movable seat of one of the height adjustment modules, and the driving rod can movably drive the movable seat to move.

6. The alignment platform according to claim 3, wherein the movable base of each height adjustment module and the movable bases of adjacent height adjustment modules move relative to the base in different directions.

7. The alignment platform according to claim 1, wherein each of the height adjustment modules further comprises a measuring device capable of measuring the position of the supporting portion.

8. The alignment platform according to any one of claims 1 to 7, wherein the adjustment module comprises at least one arc-convex portion, the at least one arc-convex portion is provided on the at least one height adjustment module or the at least one XY adjustment module, and the at least one arc-convex portion abuts against the carrier.

9. The alignment platform according to claim 8, wherein at least one groove is provided on a side of the carrier facing the adjustment module, and the at least one arc convex portion is inserted into the at least one groove.

10. The alignment platform according to claim 4, wherein the base defines a central axis, the plurality of height adjustment modules are spaced apart around the central axis, and at least two of the diagonally arranged XY adjustment modules are each provided with a third driving mechanism; the adjustment module comprises a plurality of first driving mechanisms, wherein a driving rod of each of the first driving mechanisms is connected to the movable seat of one of the height adjustment modules, and the driving rod is capable of movably driving the movable seat to move; the movable seat of each height adjustment module and the movable seats of adjacent plurality of height adjustment modules move relative to the base in different directions; each height adjustment module further comprises a measuring device capable of measuring the position of the supporting portion; the adjustment module comprises a plurality of arc convex portions, wherein the plurality of arc convex portions are provided on the plurality of height adjustment modules or the plurality of XY adjustment modules. Y adjustment module, the multiple arc convex parts press against the carrier; the side of the carrier facing the adjustment module is provided with multiple grooves, and the multiple arc convex parts are stuck in the multiple grooves; the supporting part of each height adjustment module has a first inclined part, and the movable seat of each height adjustment module has a second inclined part, the first inclined part is provided with a first inclined slide rail extending obliquely, and the second inclined part is provided with a second inclined slide rail extending obliquely, and the first inclined slide rail can be slidably provided on the second inclined slide rail; the base is also provided with a plurality of first rails extending in the horizontal direction and a plurality of second rails extending in the vertical direction, and a third rail of each movable seat can be slidably provided on it along one of the first rails, and a fourth rail of each supporting part can be slidably provided on it along one of the second rails.

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