Device for producing micro- and / or nanostructures

TW202631361APending Publication Date: 2026-08-01EV GRP E THALLNER GMBH
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Patent Information

Application Number
TW115103630
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2020-07-06
Filing Date
2021-06-10
Publication Date
2026-08-01

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Abstract

A method and a device for producing micro- and / or nanostructures.
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