Liquid ejection device, control method for liquid ejection device, substrate processing apparatus and article manufacturing method

Abstract

This invention provides a technique that helps reduce the time and liquid consumption required for restoring defective nozzles. The liquid ejection device includes: an ejection element for ejecting liquid; a driver for driving the ejection element; and a control unit for controlling the driver. The driver is configured to prepare multiple data sets having pulse patterns whose frequency decreases progressively over predetermined time intervals. Here, the frequencies of the pulse patterns differ among the multiple data sets. The control unit controls the driver to sequentially supply each of the multiple data sets, starting with the data set with the highest frequency of the pulse pattern, to the ejection element for pre-ejection.

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