Colorless, particle-free, aminosilane-containing wet etch formulations

Abstract

Colorless etchant compositions and method of obtaining colorless etchant compositions are provided. Etchant compositions may comprise a phosphoric acid, an amine-containing compound, and a light absorbing compound. The light absorbing compound is a reaction product of the phosphoric acid and a decolorizing agent. The decolorizing agent may comprise a lanthanide compound in its highest oxidation state and have strong scavenging properties of reactive oxygen species or organic radicals formed during thermally or photochemically induced amine oxidation.

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