Processing of ammonia and peroxide in liquid streams

Abstract

Methods and related systems for treating ammonia- and hydrogen peroxide-containing streams are provided. Some embodiments relate to decomposing at least some hydrogen peroxide in a first stream that contains both ammonia and hydrogen peroxide. The resulting stream may be treated (e.g., using a stripper and scrubber subsystem) to enrich the ammonia while, in some instances, using the ammonia to at least partially neutralize a second stream that contains sulfuric acid and hydrogen peroxide. The first and / or second stream may contain and / or be derived from semiconductor processing wastewater. The resulting neutralized stream may have a sufficiently high pH for further hydrogen peroxide decomposition. The methods and systems may further produce ammonium sulfate, which may be further concentrated (e.g., to form a solid ammonium sulfate salt).

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