Quartz glass and its manufacturing methods, quartz glass components

Abstract

This invention provides at least one of a quartz glass, a method for manufacturing the same, and a quartz glass component for a semiconductor heat treatment apparatus comprising the same, wherein the quartz glass exhibits heat-shielding properties, does not require multi-stage steps for imparting corrosion resistance, and, compared to previously heat-shielding quartz glasses, achieves a high corrosion resistance effect through surface treatment. A quartz glass has a porosity of more than 0% and less than 5%, and the proportion of pores with a pore diameter of 5 μm or less is 30% or more.

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