Quartz glass and its manufacturing methods, quartz glass components
Quartz glass with controlled porosity and surface treatment addresses surface corrosion issues, enhancing corrosion resistance and mechanical strength for semiconductor applications.
TW202631528APending Publication Date: 2026-08-01TOSOH CORP +2
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Patent Information
- Application Number
- TW115103333
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-01-28
- Filing Date
- 2026-01-28
- Publication Date
- 2026-08-01
AI Technical Summary
Technical Problem
Existing quartz glass used in semiconductor heat treatment apparatuses suffers from surface corrosion leading to particle generation and decreased mechanical strength, necessitating multi-stage processes for corrosion resistance and limiting shape freedom.
Method used
Quartz glass with controlled porosity and pore diameter, treated to enhance corrosion resistance without requiring multi-stage processes, achieving high corrosion resistance through surface treatment.
Benefits of technology
The quartz glass exhibits improved corrosion resistance and mechanical strength, suitable for applications like flange members in semiconductor devices, with enhanced heat-shielding properties and shape flexibility.
✦ Generated by Eureka AI based on patent content.
Abstract
This invention provides at least one of a quartz glass, a method for manufacturing the same, and a quartz glass component for a semiconductor heat treatment apparatus comprising the same, wherein the quartz glass exhibits heat-shielding properties, does not require multi-stage steps for imparting corrosion resistance, and, compared to previously heat-shielding quartz glasses, achieves a high corrosion resistance effect through surface treatment. A quartz glass has a porosity of more than 0% and less than 5%, and the proportion of pores with a pore diameter of 5 μm or less is 30% or more.
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