Ceramic components containing beryllium aluminate

TW202631539APending Publication Date: 2026-08-01MATERION CORP
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
MATERION CORP
Filing Date
2025-12-01
Publication Date
2026-08-01

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Abstract

g / cc. The beryllium aluminate components may be used in pedestal assemblies, wafer pedestals, wafer chucks, integral resistance heaters, and / or components thereof, as well as for optically stimulated luminescence, thermoluminescence, radioluminescence, or dosimetry systems thereof. Processes for preparing the beryllium aluminate ceramic components are also disclosed.
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