Iodine-containing (METH)acrylate compound and method for preparing iodine-containing hydroxyl polymer
TW202631570APending Publication Date: 2026-08-01MITSUBISHI GAS CHEM CO INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- MITSUBISHI GAS CHEM CO INC
- Filing Date
- 2025-09-09
- Publication Date
- 2026-08-01
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Abstract
The present invention is to provide a compound that can further enhance EUV sensitivity and temporal stability, is useful for the production of photoresist layer forming materials, and has excellent storage stability. The solution is a compound represented by formula (I) or formula (II) (wherein, Ring A represents an aromatic ring; Ring B represents a non-aromatic heterocycle; R1 represents hydrogen or a methyl group; R2 represents a substituent, one or more of which are iodine atoms; R3 represents a substituent; R4 represents a linear or branched alkyl group; X represents O or S; a, b, and c represent
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