Organometallic compounds, methods of synthesizing organometallic compounds, and methods of depositing metal oxide films and metal nitride films

TW202631640APending Publication Date: 2026-08-01SEASTAR CHEM ULC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
SEASTAR CHEM ULC
Filing Date
2025-12-02
Publication Date
2026-08-01

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Abstract

Disclosed herein are organometallic compounds including monomeric alkoxyaminosilane complexes and dimeric alkoxyaminosilane complexes useful as precursors for metal oxide and metal nitride vapor phase deposition. Additionally, disclosed herein are methods for synthesizing these organometallic compounds and methods for forming metal oxide films and metal nitride films by vapor phase deposition using these organometallic compounds.
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