High purity precursor compositions and related methods

TW202631642APending Publication Date: 2026-08-01ENTEGRIS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ENTEGRIS INC
Filing Date
2025-11-24
Publication Date
2026-08-01

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Abstract

High purity precursor compositions and related methods are provided herein. The method includes obtaining a metal complex and a reagent. The method includes contacting the metal complex and the reagent to form a reaction product. The reaction product has a purity of at least
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