Method for manufacturing protective film forming film and workpiece monolithic material with protective film

Abstract

The technical problem of this invention is to provide a protective film forming film that can easily determine whether a thermosetting protective film forming film has been heated, and a method for manufacturing a workpiece monolith with a protective film, such as a semiconductor wafer, using the protective film forming film. The solution of this invention is a protective film forming film, which is a thermosetting protective film forming film for attaching to a workpiece to form a protective film. The chromaticity Y of the surface of the protective film forming film at 23°C, as defined by the Yxy color system, is set as Y1. The chromaticity Y of the surface of the protective film forming film at 23°C, as defined by the Yxy color system, after heating the aforementioned protective film forming film at 140°C for 2 hours is set as Y2. When the absolute value of the difference between Y1 and Y2 is set as YA, YA is 2.00 or higher.

Images