Grinding composition and grinding method
TW202631916APending Publication Date: 2026-08-01FUJIMI INCORPORATED
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- FUJIMI INCORPORATED
- Filing Date
- 2025-09-23
- Publication Date
- 2026-08-01
Abstract
This invention provides a grinding composition that can improve the grinding removal rate. The grinding composition provided by this invention comprises permanganate, rare earth salt (excluding those containing cerium), and salts of metal cations and anions with a pKa of 2 to 6.
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