Grinding composition and grinding method

TW202631950APending Publication Date: 2026-08-01FUJIMI INCORPORATED
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
FUJIMI INCORPORATED
Filing Date
2025-09-23
Publication Date
2026-08-01
Patent Text Reader

Abstract

This invention provides a grinding composition capable of achieving excellent grinding removal rates. The grinding composition provided by this invention comprises a permanganate and a zirconium oxychloride. In this grinding composition, regarding the zirconium oxychloride, the ratio of the molar concentration c of the zirconium oxychloride in an aqueous solution of the zirconium oxychloride to the molar concentration N of the acid is greater than 1.8.
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