Grinding composition and grinding method
TW202631950APending Publication Date: 2026-08-01FUJIMI INCORPORATED
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- FUJIMI INCORPORATED
- Filing Date
- 2025-09-23
- Publication Date
- 2026-08-01
Abstract
This invention provides a grinding composition capable of achieving excellent grinding removal rates. The grinding composition provided by this invention comprises a permanganate and a zirconium oxychloride. In this grinding composition, regarding the zirconium oxychloride, the ratio of the molar concentration c of the zirconium oxychloride in an aqueous solution of the zirconium oxychloride to the molar concentration N of the acid is greater than 1.8.
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