Purification of photoresist polymer by surface-modified porous polyethylene membrane

TW202631951APending Publication Date: 2026-08-01ENTEGRIS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ENTEGRIS INC
Filing Date
2025-11-18
Publication Date
2026-08-01

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Abstract

Described are ligand-modified porous membranes that include a porous polymeric membrane having a ligand-modified surface, the ligand-modified surface having a hydrogen bond-acceptor group-containing ligand, a hydrogen bond-donor group-containing ligand, or both of these; methods of making the ligand-modified porous membrane; and method of using the ligand-modified porous membrane to filter a photoresist solution and remove unwanted polymer molecules from the photoresist solution.
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