Tilted large area manipulator for collimated deposition and carry module

Abstract

A tilted large area manipulator for collimated deposition and carry module are provided. The dual-tilt large-area collimated coating apparatus includes a base module, a rotation module, and a carry module. The rotation module is movably disposed on the base module. The carry module includes a module body, a carrier component, a first driving component, and a second driving component. The module body is connected to the rotation module and has a receiving space, a first opening, and a plurality of shielding elements. The receiving space communicates with the first opening, and the plurality of shielding elements are configured to open or shield the first opening. The carrier component is configured to hold an object. The first driving component is configured to drive the carrier component to perform reciprocating displacement in a first direction or a second direction. The second driving component is configured to drive the carrier component to rotate about a first axis. By utilizing the above design, the dual-tilt large-area collimated coating apparatus and the carry module enable a more uniform film thickness during tilted-angle coating processes.

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