A method for producing graphite fluoride granules

TW202632046APending Publication Date: 2026-08-01APPLIED MATERIALS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2025-10-20
Publication Date
2026-08-01

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Abstract

A method of manufacturing granules is provided. The method includes flowing an inert gas and a fluorine-containing gas into a plasma source at a first ratio; generating a fluorine-containing plasma from the inert gas and the fluorine-containing gas by the plasma source; and applying the fluorine containing plasma to porous carbon granules in process chamber. The fluorine-containing plasma reacts with a surface of the carbon granules to form a carbon fluoride layer on the surface of the carbon granules.
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