Deposition of crystalline boron nitride films

TW202632049APending Publication Date: 2026-08-01EMD PERFORMANCE MATERIALS CORP +1
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
EMD PERFORMANCE MATERIALS CORP
Filing Date
2025-12-11
Publication Date
2026-08-01

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Abstract

The disclosed and claimed subject matter relate to compositions and methods for forming a crystalline boron-containing film.
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