Manufacturing system for film-forming dispersion, mist film-forming device, and film-forming method
TW202632055APending Publication Date: 2026-08-01NIKON CORP
View PDF 0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- NIKON CORP
- Filing Date
- 2025-11-27
- Publication Date
- 2026-08-01
Smart Images

Figure TWG2TA001071294_001 
Figure TWG2TA001071294_002 
Figure TWG2TA001071294_003
Abstract
The present invention relates to a system for manufacturing a film-forming dispersion, which has a receiving tank having a supply port supplying a first mist into the receiving tank. The first mist is obtained by atomizing a first dispersion containing a first particle. The receiving tank contains the liquid formed by liquefying the first mist as a second dispersion, and the supply port is disposed in the liquid of the second dispersion. none
Need to check novelty before this filing date? Find Prior Art