Manufacturing system for film-forming dispersion, mist film-forming device, and film-forming method

TW202632055APending Publication Date: 2026-08-01NIKON CORP
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
NIKON CORP
Filing Date
2025-11-27
Publication Date
2026-08-01

Smart Images

  • Figure TWG2TA001071294_001
    Figure TWG2TA001071294_001
  • Figure TWG2TA001071294_002
    Figure TWG2TA001071294_002
  • Figure TWG2TA001071294_003
    Figure TWG2TA001071294_003
Patent Text Reader

Abstract

The present invention relates to a system for manufacturing a film-forming dispersion, which has a receiving tank having a supply port supplying a first mist into the receiving tank. The first mist is obtained by atomizing a first dispersion containing a first particle. The receiving tank contains the liquid formed by liquefying the first mist as a second dispersion, and the supply port is disposed in the liquid of the second dispersion. none
Need to check novelty before this filing date? Find Prior Art