Inspection table and inspection method

TW202632095APending Publication Date: 2026-08-01TOKUYAMA CORP
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
TOKUYAMA CORP
Filing Date
2025-09-25
Publication Date
2026-08-01

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Abstract

An inspection table that can reduce polysilicon contamination is provided. The inspection table is a movable inspection table with wheels, and includes: a basket receiving part on which a cleaning basket for cleaning and drying polysilicon is placed when polysilicon is contained; and a support part that rotatably supports the basket receiving part and tilts the basket receiving part.
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