Superheated-steam generating method and superheated-steam generating apparatus
TW202632185APending Publication Date: 2026-08-01EBARA CORP
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- EBARA CORP
- Filing Date
- 2025-09-23
- Publication Date
- 2026-08-01
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Abstract
A method and apparatus for generating superheated steam that can rapidly generate superheated steam and prevent it from becoming excessively hot are provided. The superheated steam generation method involves determining a heater temperature command value to minimize the temperature difference within a first heater temperature allowable range (R1) set in a first time interval (T1). When the measured temperature of the steam within the first time interval (T1) is lower than the target temperature of the superheated steam and the temperature difference is greater than a first threshold, the first heater temperature allowable range (R1) is increased by a predetermined offset to determine a second heater temperature allowable range (R2). Within the second heater temperature allowable range (R2) set in a second time interval (T2), a heater temperature command value to minimize the temperature difference is determined.
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