Superheated-steam generating method and superheated-steam generating apparatus

TW202632185APending Publication Date: 2026-08-01EBARA CORP
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
EBARA CORP
Filing Date
2025-09-23
Publication Date
2026-08-01

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Abstract

A method and apparatus for generating superheated steam that can rapidly generate superheated steam and prevent it from becoming excessively hot are provided. The superheated steam generation method involves determining a heater temperature command value to minimize the temperature difference within a first heater temperature allowable range (R1) set in a first time interval (T1). When the measured temperature of the steam within the first time interval (T1) is lower than the target temperature of the superheated steam and the temperature difference is greater than a first threshold, the first heater temperature allowable range (R1) is increased by a predetermined offset to determine a second heater temperature allowable range (R2). Within the second heater temperature allowable range (R2) set in a second time interval (T2), a heater temperature command value to minimize the temperature difference is determined.
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